Abstract:High/ultra-precision motion measurements for precision translation stages are highly desired in modern manufacturing systems and instruments. In this work, we introduce a wide range three-axis grating encoder with nanometric resolution, which can measure the x-, y- and z-axial translational motions of a stage simultaneously. The grating encoder is composed of a reflective-type planar scale grating with a period of 8 μm and an optical reading head. A planar reference grating, which is the same as the planar scale grating except the length and width, is employed in the optical reading head. The x- and y- directional ±1st order diffractive beams of the planar scale grating interfere with the corresponding diffractive beams of the planar reference grating, forming the measurement signals. The x- and y- directional ±1st order diffractive beams of the two planar gratings propagate against their original incident path, working as the autocollimatic diffractive beams. Therefore, the z-axial measurement range of the proposed grating encoder is greatly enhanced. The x- and y- axial measurement ranges depend on the size of the planar scale grating. To make the grating encoder more compact, a double grating beam-splitting (DGBS) unit and two diffractive optical elements (DOEs) are introduced. The experimental results indicate that the z-axial displacement resolution is as high as 4 nm with an electronic data division card of 80 segments developed by our lab.

High displacement resolution encoder by using triple grating combination interferometer

A High-Resolution Displacement Sensor Based on a Grating Interferometer with the Phase Modulation Technique

Nanometer-scale Displacement Sensor Based on Phase-Sensitive Diffraction Grating.

Subnanometer Resolution Displacement Sensor Based on a Grating Interferometric Cavity with Intensity Compensation and Phase Modulation

Grating Encoder for Wide Range Three-Axis Displacement Measurement

An ultracompact high-resolution displacement sensor based on self-interference effect of single optical nanograting

High-resolution and Wide Range Displacement Measurement Based on Planar Grating

High-precision Microdisplacement Sensor Based on Zeroth-Order Diffraction Using a Single-Layer Optical Grating.

Large-scale range diffraction grating displacement sensor based on polarization phase-shifting

A Compact and High-Precision Three-Degree-of-Freedom Grating Encoder Based on a Quadrangular Frustum Pyramid Prism

Small-size, high-resolution angular displacement measurement technology based on an imaging detector

Displacement Measuring Grating Interferometer: a Review

A High Subdivision and Light Fluctuation-Insensitive Approach for Grating Displacement Sensors

Combined Displacement and Angle Sensor with Ultra-High Compactness Based on Self-Imaging Effect of Optical Microgratings

Precision Grating Displacement Transducer with an Image Sensor

Two-dimensional Reflective Optical Encoder Based on Point Source Illuminated Grating Imaging

A Novel Peak Positioning Method for Nanometer Displacement Measurement by Optical Linear Encoder

Grating Interferometry with High Optical Subdivision

Heterodyne Planar Grating Encoder with High Alignment Tolerance, Especially Insensitivity to Grating Tilts

A grating displacement sensor : instead of the moiré fringes, the grating line are subdivided directly by CCD

High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving