Determination of Parameters of X-ray Source Based on Single-Bounce Ellipsoidal Monocapillary X-ray Condenser

WANG Ya-bing,ZHU Yu,SUN Tian-xi,SUN Xue-peng,LIU Zhi-guo,LI Fang-zuo,JIANG Bo-wen,ZHANG Xiao-yun,ZHANG Feng-shou
DOI: https://doi.org/10.3788/ope.20172511.2872
2017-01-01
Optics and Precision Engineering
Abstract:To exactly characterize X-ray light resource parameters ,a measuring method for the focal spot size and focal depth of an X-ray source was proposed by using a single-bounce ellipsoidal monocapillary X-ray condenser (SBEMXRC) .The SBEMXRC was a kind of X-ray reflective imaging optics and characterized by its single total reflection imaging capability .The universal relationship among the focal spot size of the X-ray source ,image size of focal spot of the X-ray source and the slope errors of the SBEMXRC was determined by the X-ray sources with known spot sizes simulated by a polycapillary X-ray lens . The focal spot size of the X-ray source with a unknown spot size was accordingly obtained by analyzing image size of the focal spot .The focal depth of the X-ray source could also be measured by the designed method .To verify the feasibility of the designed method ,the spot size and the focal depth of a microfocus X-ray source in our lab were measured .The experimental results show that the arithmetic mean standard deviations of the measurement are 1 .5μm and 0 .7 mm for the X-ray source with a spot size about 50 μm and a focal depth about 20 mm ,respectively .The results demonstrate that the focal spot size and focal depth of the X-ray source could be simultaneously measured with the designed method . This method has potential applications in the field of X-ray sources .
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