Determination of Focal Spot Size of High-Energy Microfocal X-ray Source Based on HfO2-coated Single-Bounce Ellipsoidal Glass Monocapillary X-ray Condenser

Y B Wang,S K Shao,X Y Zhang,Y F Li,X P Sun,Z G Liu,T X Sun
DOI: https://doi.org/10.1088/1757-899x/770/1/012103
2020-01-01
IOP Conference Series Materials Science and Engineering
Abstract:A method based on the single-bounce ellipsoidal monocapillary X-ray condenser (SEGMXC) was improved for determining the focal spot size of the high-energy microfocal X-ray source. HfO2 was selected as the high-density material (∼9.68g/cm3) and coated on the inner surface of the SEGMXC by the atomic layer deposition method. The focal spot size of a microfocal spot X-ray source was obtained as 33.14 ± 0.02 μm and the relative deviation of the effective size given by the manufacturer was 5.3%.
What problem does this paper attempt to address?