Abstract:Controlling thermal energy transfer at the nanoscale has become critically important in many applications and thermal properties since it often limits device performance. In this work, we study the effects on thermal conductivity arising from the nanoscale structure of free-standing nanocrystalline silicon films and the increasing surface-to-volume ratio when fabricated into suspended optomechanical nanobeams. We characterize thermal transport in structures with different grain sizes and elucidate the relative impact of grain size and geometrical dimensions on thermal conductivity. We use a micro-time-domain thermoreflectance method to study the impact of the grain size distribution, from 10 to 400 nm, on the thermal conductivity in free-standing nanocrystalline silicon films considering surface phonon and grain boundary scattering. We find a drastic reduction in the thermal conductivity, down to values of 10 W.m^{-1}.K^{-1} and below, which is just a fraction of the conductivity of single crystalline silicon. Decreasing the grain size further decreases the thermal conductivity. We also observe that this effect is smaller in OM nanostructures than in membranes due to the competition of surface scattering in decreasing thermal conductivity. Finally, we introduce a novel versatile contactless characterization technique that can be adapted to any structure supporting a thermally shifted optical resonance and use it to evaluate the thermal conductivity. This method can be used with optical resonances exhibiting different mode profiles and the data is shown to agrees quantitatively with the thermoreflectance measurements. This work opens the way to a more generalized thermal characterization of optomechanical cavities and to create hot-spots with engineered shapes at desired position in the structures as a means to study thermal transport in coupled photon-phonon structures.

Thermal Conductivity of SiC Microwires: Effect of Temperature and Structural Domain Size Uncovered by 0 K Limit Phonon Scattering

Structure and thermophysical properties of single-wall Si nanotubes

Nanoscale limit of the thermal conductivity in crystalline silicon carbide membranes, nanowires, and phononic crystals

Quasi-ballistic thermal transport in silicon carbide nanowires

C244 Thermal Conductivity of Individual SiC Nanowires

Thermal Conductivity of 3C/4H-SiC Nanowires by Molecular Dynamics Simulation

Temperature-dependent Raman Scattering of Silicon Nanowires.

Isotope Doping-Induced Crossover Shift in the Thermal Conductivity of Thin Silicon Nanowires.

High thermal conductivity in wafer-scale cubic silicon carbide crystals

ICHMT 2014-XXXX Thermal Conductivity of Silicon Nanowire Using Nonequilibrium Molecular Dynamics Simulation

Tunable Thermal Conductivity of Two-Dimensional SiC Nanosheets by Grain Boundaries: Implications for the Thermo-Mechanical Sensor

Strain effect on thermal conductivity of 3C-SiC nanowire

Microstructure and Conductivity of Large Area Nanocrystalline Silicon Films Grown by Specially Designed Thermal-Assisted Chemical Vapor Deposition

Phonon Surface Scattering Controlled Length Dependence of Thermal Conductivity of Silicon Nanowires.

Thermal Conductivity of Silicon Nanowire Using Nonequilibrium Molecular Dynamics Simulation

In-situ growth of SiC nanowire arrays on carbon fibers and their microwave absorption properties

Anisotropic Thermal Conductivity of 4H and 6H Silicon Carbide Measured Using Time-Domain Thermoreflectance

Nanoscale spatially resolved thermal transport in nanocrystalline 3C-SiC

Thermal conduction in Si and SiGe phononic crystals explained by phonon mean free path spectrum

Crystal structure dependent thermal conductivity in two-dimensional phononic crystal nanostructures

Thermal properties of nanocrystalline silicon nanobeams