Enhanced Stability of ITO/In2O3 Thin Film Thermocouples by Coating Al2O3 Layer

Yantao Liu,Dan Liu,Wei Ren,Peng Shi,Ming Liu,Zuoguang Ye,Bian Tian,Zhuangde Jiang
DOI: https://doi.org/10.1109/icsens.2017.8233926
2017-01-01
Abstract:Ceramic thin film thermocouples as a kind of promising candidate thermal sensor have been used to replace noble-metal thin film thermocouples to measure the hot section of turbine energies. ITO (In 2 O:SnO 2 =90wt.%:10wt.%) and In 2 O 3 thin films with spinning Al 2 O 3 coating layer were investigated systematically and ITO/In 2 O 3 thin film thermocouples were evaluated at 1230°C for a long time. Uncoated ITO and In 2 O 3 thin film annealed at different temperatures exhibited polycrystalline phases and the degree of crystallization become more obvious along with the increase of annealing temperatures. From SEM morphologies, the grain sizes of In 2 O 3 and ITO exhibited increasing trend obviously. When ITO and In 2 O 3 thin films coated with Al 2 O 3 were annealed at 1250°C for different time, the change of thicknesses shown that alumina coating layer could effectively slow down the volatilization of ITO and In 2 O 3 films, especially ITO films. The ITO/In 2 O 3 thin film thermocouple coated with Al 2 O 3 could endure 1230°C for a long time than that of uncoated thermocouple, and the sensitivity could reach to 151.7 pV/°C.
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