A Sensitivity-Enhanced Electric Field Sensor with Electrostatic Field Bias

Xiaoming Wu,Jing'ao Huang
DOI: https://doi.org/10.1109/icsens.2017.8234142
2017-01-01
Abstract:An electrostatic field biased cantilever electric field sensor with sensitivity improvement is proposed in this paper. Theoretically, the sensitivity of the sensor is proportional to the applied electrostatic field strength. A demonstrated sensor is developed, which consists of a Silicon cantilever coated with an Aluminum Nitride (AlN) piezoelectric film for signal readout, and a PTFE electret layer for electrostatic field bias. When the surface potential of the electret layer is -683 V, the sensitivity of the cantilever electric field sensor reaches 15.8 mV/(kV/m), and the resolution is about 20 V/m.
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