Abstract:This work proposes a flexible pressure sensor with a wide detection range based on capacitive‐piezoresistive dual mode conversion. The sensor in capacitive mode can utilize the special structure of its upper electrode and dielectric layer under pressure to convert into piezoresistive mode. The combination of modes achieves a wider measurement range at ideal sensitivity while maintaining good stability. Flexible pressure sensor is widely used in fields such as healthcare, intelligent prosthetics, and patient rehabilitation. However, how to ensure high sensitivity of the sensor while having a wide detection range remains a challenge. In order to address this challenge, a flexible pressure sensor with a wide detection range based on capacitive‐piezoresistive dual mode conversion is proposed. By manufacturing circular through‐holes on the dielectric layer of the sensor, the microstructure of the upper and lower electrode layers can achieve non‐contact and contact switching under different pressures through the through holes. This means that the sensor remains in capacitive mode at low pressure and then in piezoresistive mode at high pressure. By cleverly combining the two modes, the measurement range can reach 2 000 kPa and high sensitivity can be maintained during mode switching. In addition, its production process is simple, the cost is low, and it has a fast response time (120 ms) and good repeatability stability. The experimental results indicate that the sensor can achieve ideal performance in proximity detection, human behavior monitoring, and ultra high‐pressure detection, and has broad application prospects in providing a more powerful human‐computer interaction interface and expanding more comprehensive health monitoring.

Electric Field Sensor Based on Piezoelectric Bending Effect for Wide Range Measurement

A high-resolution electric field sensor based on piezoelectric bimorph composite

Micro-cantilever Electric Field Sensors Based on Piezoelectric-piezoresistive Coupling

A Planar Capacitive Sensor for 2D Long-Range Displacement Measurement

Micro Piezoelectric-capacitive Sensors for Highsensitivity Measurement of Space Electric Fields

A Piezoelectric–Piezoresistive Coupling Electric Field Sensor for Large Dynamic Range AC Electric Field Measurements

Micro-Cantilever Electric Field Sensor Driven by Electrostatic Force

Micro Capacitive Electric-field Sensor Based on Electrostatic Force

Micro-Cantilever Capacitive Sensor for High-Resolution Measurement of Electric Fields

A Single-Chip 3-D Electric Field Microsensor With Piezoelectric Excitation

Piezoelectric–Piezoresistive Coupling MEMS Sensors for Measurement of Electric Fields of Broad Bandwidth and Large Dynamic Range

A novel high-sensitivity electrostatic biased electric field sensor

Piezoelectric Polyacrylonitrile Nanofiber Film-Based Dual-Function Self-Powered Flexible Sensor.

Design of an electro-optical sensor with high sensitivity for AC electric field measurement

A Flexible Pressure Sensor with Wide Detection Range Based on Capacitive‐Piezoresistive Dual Mode Conversion for Human‐Machine Interaction

Flexible Piezoelectric Tactile Sensor Array For Dynamic Three-Axis Force Measurement

A Sensitivity-Enhanced Electric Field Sensor with Electrostatic Field Bias

A highly sensitive piezoresistive sensor based on MXene and polyvinyl butyral with a wide detection limit and low power consumption

Structural optimization and simulation of piezoelectric- piezoresistive coupled MEMS steady-state electric field sensor

Investigating Capacitive Flexible Tactile Sensor with a Wide Measuring Range Using PVDF and Conductive Sponge

A High Sensitivity Electric Field Microsensor Based on Torsional Resonance