Micro-cantilever Electric Field Sensors Based on Piezoelectric-piezoresistive Coupling

Z. Han,F. Xue,J. Hu,J. He

DOI: https://doi.org/10.1049/icp.2022.0277

2021-01-01

Abstract:With the development of the ubiquitous power Internet of Things, online monitoring and status awareness of power systems and equipment has become an important method to ensure the safe operation of the power grid. The measurement of electric fields can be used for fault diagnosis of power equipment such as such as insulator failure. At the same time, by inverting the line voltage through the electric field, wide-area online monitoring of the power system can be achieved. Therefore, miniature electric-field sensors (E-sensors) with high sensitivity and high amplitude are needed. In this paper, we proposed a novel miniature E-sensor with cantilever structure. The proposed E-sensor combines the piezoelectric effect and the piezoresistive effect. Experimental results show that our sensor has a high resolution of 156 V/m and a magnitude of over 1.5 MV/m. Moreover, silicon-based micro-fabrication makes our sensor has low cost and are suitable for mass production, which is suitable for large-scale sensor arrays and wide-area monitoring.