Abstract:We investigate the architecture of microfabricated vapor cells with reflective sidewalls for applications in chip scale atomic sensors. The optical configuration in operation is suitable for both one-beam and two-beam (pump & probe) schemes. In the miniaturized vapor cells, the laser beam is reflected twice by the aluminum reflectors on the wet etched 54.7° sidewalls to prolong the optical length significantly, thus resulting in a return reflectance that is three times that of bare silicon sidewalls. To avoid limitations faced in the fabrication process, a simpler, more universal and less constrained fabrication process of microfabricated vapor cells for chip scale atomic sensors with uncompromised performance is implemented, which also decreases the fabrication costs and procedures. Characterization measurements show that with effective sidewall reflectors, mm3 level volume and feasible hermeticity, the elongated miniature vapor cells demonstrate a linear absorption contrast improvement by 10 times over the conventional micro-electro-mechanical system (MEMS) vapor cells at ~50 °C in the rubidium D1 absorption spectroscopy experiments. At the operating temperature of ~90 °C for chip scale atomic sensors, a 50% linear absorption contrast enhancement is obtained with the reflective cell architecture. This leads to a potential improvement in the clock stability and magnetometer sensitivity. Besides, the coherent population trapping spectroscopy is applied to characterize the microfabricated vacuum cells with 46.3 kHz linewidth in the through cell configuration, demonstrating the effectiveness in chip scale atomic sensors.

Influence of Buffer-Gas Pressure Inside Micro Alkali Vapor Cells on the Performance of Chip-Scale SERF Magnetometers

Ultrasensitive SERF atomic magnetometer with a miniaturized hybrid vapor cell

Suppression of the vapor cell temperature error in a spin-exchange relaxation-free comagnetometer

A single beam Cs-Ne SERF magnetometer with differential laser power noise suppression method

Investigation on Spin Relaxation of Microfabricated Vapor Cells with Buffer Gas

Single Beam Cs-Ne SERF Atomic Magnetometer with the Laser Power Differential Method

Microfabricated Vapor Cells with Chemical Polishing and Two-Step Low-Temperature Anodic Bonding for Single-Beam Magnetometer

Suppression of thermal coupling noise in the SERF atomic co-magnetometer

Characterization of 87Rb MEMS vapor cells for miniature atomic magnetometers

In-situ determination of spin polarization in a single-beam fiber-coupled spin-exchange-relaxation-free atomic magnetometer with differential detection

A Sensitivity Dependence Study for the Chip-Scale Atomic Magnetometer on the Atomic Vapor Cell Size

Micro-fabricated alkali vapor cells for atomic spin gyroscope study

Femtotesla Spin-Exchange Relaxation-Free Atomic Magnetometer With a Multipass Cell

Characterization of <SUP>87</SUP>Rb MEMS vapor cells for miniature atomic magnetometers

Enhancing Dynamic Performance in K-Rb-21Ne Co-Magnetometers through Atomic Density Optimization

Microfabrication of MEMS Alkali Metal Vapor Cells for Chip-Scale Atomic Devices

Longitudinal spin-relaxation optimization for miniaturized optically pumped magnetometers

Real-time buffer gas pressure tuning in a micro-machined vapor cell

Real-time nondemolition measurement method for alkali vapor density and its application in a spin-exchange relaxation-free co-magnetometer

Functionalized mm-scale vapor cells for alkali-metal spectroscopy and magnetometry

Microfabricated Vapor Cells with Reflective Sidewalls for Chip Scale Atomic Sensors