A compact MEMS-based wide-angle optical scanner

B. Yang,Liang Zhou,Xiaoyang Zhang,Sanjeev J. Koppal,Huikai Xie

DOI: https://doi.org/10.1109/OMN.2017.8051503

2017-01-01

Abstract:A compact laser scanner that scans approximately 90° has been demonstrated, which is enabled by an electrothermal MEMS mirror encapsulated in a 3D printed holder with a curved dome for optical amplification.

What problem does this paper attempt to address?

Design and Fabrication of a Forward View Scanner on SiOB with Latch Structure for Improved Vertical Orientation

Dingkang Wang,Dong Zheng,Sanjeev Koppal,Boqian Sun,Huikai Xie

DOI: https://doi.org/10.1109/mems51782.2021.9375454

2021-01-01

Abstract:MEMS mirror based forward-view optical scanning typically requires a second mirror to direct the optical beam forward, which increases the size and weight of the scanner drastically. This paper reports a compact forward-view laser scanner with two vertically oriented scanning micromirrors integrated on a silicon optical bench. This concept was previously explored, but the bending angles of the vertical mirrors had large deviations (typically ±15°) from 90°. In this work, a new latch structure is proposed to secure the mirror frame at its vertical position and an array of meander thin-film stripes is proposed to ensure the latching. The new design has been successfully fabricated and shows much-improved verticality with a maximum deviation of less than ± 2° from 90°. The measured forward field of view (FoV) of the vertical micromirror reaches 20° in both axes at non-resonance with the voltage amplitude less than 3.5 V. The first-order resonant frequency of the micromirror is about 630 Hz. A forward scanning LiDAR has been built with this new MEMS scanner and 3D point clouds have been achieved.
A Monolithic Forward-View Optical Scanner by a Pair of Upright MEMS Mirrors on a SiOB for LiDAR Applications

Dingkang Wang,Dong Zheng,Sanjeev J. Koppal,Boqian Sun,Huikai Xie

DOI: https://doi.org/10.1109/jmems.2021.3100077

IF: 2.829

2021-01-01

Journal of Microelectromechanical Systems

Abstract:A forward-view optical scanner made of a MEMS mirror typically needs a second mirror to fold the optical beam forward, and thus an assembly structure is required, which drastically increases the overall size and weight of the scanner. This paper reports an ultra-small forward-view optical scanner with two vertically oriented micromirrors integrated on a silicon optical bench (SiOB). A new latch structure is proposed to secure the mirror frame at its vertical position and an array of meander thin-film stripes is designed to assist the latching process. The new design has been successfully fabricated and shows much-improved verticality with a maximum deviation of less than ±2° from 90°. With an optical aperture of 0.7 mm, the form factor of the MEMS chip is 4.9 mm (length) by 4.7 mm (width) by 1.8 mm (height). The measured forward field of view (FoV) of the vertical micromirrors reaches 21° in both axes at non-resonance with the voltage amplitude less than 4 V. The first resonant frequency (corresponding to the mirror frame rotation mode) of the micromirror is about 630 Hz. A fiber-pigtail bonded forward scanner is assembled with a footprint of 2 cm by 1.2 cm and a weight of 0.6 g. A forward scanning LiDAR has been built with this new MEMS scanner. The non-resonant scanning capability enables forward-view adaptive resolution and zoom-in scanning capability. [2021-0132]
A Compact Omnidirectional Laser Scanner Based on an Electrothermal Tripod Mems Mirror for Lidar Please Leave

Dingkang Wang,Conor Watkins,Sanjeev Koppal,Mengyuan Li,Yingtao Ding,Huikai Xie

DOI: https://doi.org/10.1109/transducers.2019.8808659

2019-01-01

Abstract:Low-cost LiDAR with compact omnidirectional 360° scanners are needed for automobiles and robotics. This paper reports a compact omnidirectional scanner based on an electrothermal MEMS mirror, in which a circular pattern is generated by a two-axis tripod electrothermal MEMS mirror at non-resonant mode combined with a cone mirror. Meanwhile the vertical scanning field of view (FoV) up to 8° is also achieved. Compared to other omnidirectional scanners based on motorized optomechanics, this MEMS-based omnidirectional scanner has the potential to greatly decrease the size, cost and power consumption for LiDAR.
A Monolithic Forward-View MEMS Laser Scanner with Decoupled Raster Scanning and Enlarged Scanning Angle for Micro LiDAR Applications

Dingkang Wang,Sanjeev J. Koppal,Huikai Xie

DOI: https://doi.org/10.1109/jmems.2020.3001921

IF: 2.829

2020-01-01

Journal of Microelectromechanical Systems

Abstract:This paper reports the design, fabrication, and characterization of a forward-view optical scanner realized by two vertical 2-axis MEMS mirrors integrated on a Silicon Optical Bench (SiOB). The mirror plate sizes of the first and second MEMS mirrors are $0.6\times 0.7$ mm2 and $1.2\times 1.4$ mm2, respectively. With the second MEMS mirror larger, the optical beam will not be truncated even during large-angle dynamic scanning. This dual-mirror configuration also enables multiple scanning modes, e.g., an enlarged 2D field of view (FoV) by combining the scans of both mirrors, and a decoupled raster scanning by actuating the two mirrors separately. Experiments show that the enlarged 2D FoV reached 28°(h) $\times 31^{\circ }$ (v) and the FoV of the decoupled raster scanning reached 38°(h) $\times 8^{\circ }$ (v). The measured first resonances of the two mirrors were 2.09 kHz and 0.85 kHz, respectively. The overall size of the MEMS scanner was only $5.3\times 5.8\times 3.0$ mm3, and its weight was 20 mg. This 2-axis forward optical scanner is much smaller and lighter than other two-mirror scanning modules, giving it a great potential for applications in miniature LiDAR for micro-robotics. [2020-0081]
Wide-Angle Structured Light with A Scanning Mems Mirror in Liquid

Xiaoyang Zhang,Sanjeev J. Koppal,Rui Zhang,Liang Zhou,Elizabeth Butler,Huikai Xie

DOI: https://doi.org/10.1364/oe.24.003479

IF: 3.8

2016-01-01

Optics Express

Abstract:Microelectromechanical (MEMS) mirrors have extended vision capabilities onto small, low-power platforms. However, the field-of-view (FOV) of these MEMS mirrors is usually less than 90° and any increase in the MEMS mirror scanning angle has design and fabrication trade-offs in terms of power, size, speed and stability. Therefore, we need techniques to increase the scanning range while still maintaining a small form factor. In this paper we exploit our recent breakthrough that has enabled the immersion of MEMS mirrors in liquid. While allowing the MEMS to move, the liquid additionally provides a "Snell's window" effect and enables an enlarged FOV (≈ 150°). We present an optimized MEMS mirror design and use it to demonstrate applications in extreme wide-angle structured light.
A Silicon Optical Bench-Based Forward-View Two-Axis Scanner for Microendoscopy Applications

Dong Zheng,Dingkang Wang,Y. K. Yoon,Huikai Xie

DOI: https://doi.org/10.3390/mi11121051

IF: 3.4

2020-01-01

Micromachines

Abstract:Optical microendoscopy enabled by a microelectromechanical system (MEMS) scanning mirror offers great potential for in vivo diagnosis of early cancer inside the human body. However, an additional beam folding mirror is needed for a MEMS mirror to perform forward-view scanning, which drastically increases the diameter of the resultant MEMS endoscopic probe. This paper presents a new monolithic two-axis forward-view optical scanner that is composed of an electrothermally driven MEMS mirror and a beam folding mirror both vertically standing and integrated on a silicon substrate. The mirror plates of the two mirrors are parallel to each other with a small distance of 0.6 mm. The laser beam can be incident first on the MEMS mirror and then on the beam folding mirror, both at 45 degrees. The MEMS scanner has been successfully fabricated. The measured optical scan angles of the MEMS mirror were 10.3 degrees for the x axis and 10.2 degrees for the y axis operated under only 3 V. The measured tip-tilt resonant frequencies of the MEMS mirror were 1590 Hz and 1850 Hz, respectively. With this compact MEMS design, a forward-view scanning endoscopic probe with an outer diameter as small as 2.5 mm can be made, which will enable such imaging probes to enter the subsegmental bronchi of an adult patient.
A 2-Axis MEMS Scanning Micromirror with a 45° Auto-Positioning Mechanism for Endoscopic Probe

Quentin A. A. Tanguy,Sylwester Bargiel,Can Duan,Wei Wang,Przemyslaw Struk,Huikai Xie,Philippe Lutz,Christophe Gorecki

DOI: https://doi.org/10.1109/transducers.2017.7994450

2017-01-01

Abstract:In this paper, we report a novel 2-axis electrothermal MEMS micro-scanner with an initial tilt at 45° out of its support plane. A new type of mechanical stopper is designed to hold the structure in the initial oblique bending position, which enables a cross axis decoupling. The micro-scanner is a key component of a fully integrated endoscopic imaging probe for 3D Swept Source (SS) Optical Coherence Tomography (OCT) imaging system and is developed with the objective of proposing an assembly adapted for industrial manufacturing.
Design and Realization of Wide Field-of-View 3D MEMS LiDAR

Chia-Hsing Lin,Hao-Sheng Zhang,Chia-Ping Lin,Guo-Dung J. Su

DOI: https://doi.org/10.1109/jsen.2021.3127045

IF: 4.3

2022-01-01

IEEE Sensors Journal

Abstract:Light detection and ranging (LiDAR) sensors are promising for automated transportation to detect the surrounding environment. However, most LiDAR solutions are complex and bulky. By designing a MEMS-mirror-based LiDAR, we can improve the volume constraints, but MEMS mirrors could limit scanning angles. In this work, we simulated and demonstrated a MEMS LiDAR system to solve the current obstacles. Combining a MEMS mirror and a wide-angle lens into the system, small-volume and large field-of-view (FOV) LiDAR systems can be realized. We use ray tracing optical simulation software to design a pair of aspherical lenses to expand the scanning angle. After the laser beam passes through the wide-angle lens, the FOV can be increased to 104 degrees. The distortion of the wide-angle lens is controlled below 3%, making the scanned image precise to the actual situation. In order to experimentally demonstrate the small-volume MEMS scanning LiDAR, a modular laser rangefinder is used with a MEMS mirror. The entire system of the LiDAR scanner is around 15 cm $\times5$ cm $\times2.5$ cm. In the natural light environment for wide-angle LiDAR measurement, the maximum error is less than 2%. Finally, an image processing program is written to convert the scanned data into a 3D point cloud image, and the generated image proves the complete function of the proposed LiDAR.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
Low-voltage Wide-Field-of-view Lidar Scanning System Based on a MEMS Mirror.

Jingkun Zhou,Keyuan Qian

DOI: https://doi.org/10.1364/ao.58.00a283

IF: 1.9

2019-01-01

Applied Optics

Abstract:Lidar has been widely used in many fields, such as autopilots and target detection. However, commonly used lidar with a rotary mechanical structure has difficulty achieving high vertical resolution. Some lidars with micro-electro-mechanical-system (MEMS) union are driven by high voltage and cannot uniformly scan at a large scan angle. This paper proposes a uniform scanning system in wide field of view (FOV) based on a MEMS mirror for 3D imaging lidar. We use a dual-axis electromagnetic-driving MEMS mirror, which can be used for arbitrary-direction optical beam steering with a low operating voltage. We design a uniform angle scanning system and set up the scanning system to analyze the scan angle, spot size, and luminous flux on the target plane. The experimental results show that this system can scan uniformly within a large FOV with a small spot size, at a target plane 100 m away.
Design Study of a Large-Angle Optical Scanning System for MEMS LIDAR

Yajun Pang,Kai Zhang,Zhenxu Bai,Youchun Sun,Meiling Yao

DOI: https://doi.org/10.3390/app12031283

2022-01-25

Applied Sciences

Abstract:MEMS-based LIDAR has the advantages of fast-scanning, simple structure, small volume, and light weight, which make it a hot topic for 3D imaging. In order to overcome the limited scanning angle of the current MEMS mirrors, a large angle MEMS-based optical scanning system was designed using telephoto structure. In this design an f-θ lens group is used for flat field scanning and a symmetrical cemented lens group is used for angle expansion. The principle of this system is discussed in detail and an optical design is implemented by ZEMAX software. The designed system realized a scanning angle as large as 57° and is in excellent linear relation with the tilt angle of the MEMS mirror. At the target distance of 100 m, the maximum RMS radius of the light spot is only 7 cm. This optical scanning system shows a significant application potentiality for 3D imaging LIDAR.
Wide angle LiDAR demonstrator based on a resonantly operated 1D MEMS mirror capable of scanning 180°

Leon Pohl,Fabian Schwarz,Peter Blicharski,Christian Janicke,Oleg Petrak,Thomas von Wantoch,Ulrich Hofmann

DOI: https://doi.org/10.1117/12.2578151

2021-03-05

Abstract:The wish for higher-level advanced driver assistance systems requires infrared based ranging systems like LiDAR provided that it offers high speed, wide field-of-view, small size and especially low cost. The only way to combine these attributes is the use of cost-efficient and mass-producible MEMS scanners suitable for automotive applications. In this work we present a wide-angle LiDAR demonstrator for short range applications based on a single resonantly operated MEMS, a single laser and single light detector. The MEMS mirror is capable of tilting 45 mechanically and thus enabling a large field-of-view of up to 180. The incorporated mirror plate has an elliptical shape of 2 mm x 4 mm in size and the overall volume of the MEMS device is less than 0.7 cm3. Low-power microcontroller based closed-loop electronics is used to keep the very high Q device within its resonance frequency range at all times enabling high scan rates of more than 3000 scans per second and accurate position detection better than 0.1. Both automotive suitability and high energy efficiency is achieved by hermetic wafer-level sealing under vacuum as well as internal piezoelectric drive and sense structures. The demonstrated wide-angle scanning LiDAR further consists of a 905 nm eye-safe pulse laser source operating at up to 200 kHz with an optical peak output power of 30 W as well as a one-dimensional SPAD based detector with 2x192 channels. Together this leads to high density and high resolution point clouds using just a single laser, detector and MEMS scanner.
An Integrated Forward-View 2-Axis Mems Scanner for Compact 3D Lidar

Dingkang Wang,Stephan Strassle Rojas,Alexander Shuping,Zaid Tasneem,Sanjeev Koppal,Huikai Xie

DOI: https://doi.org/10.1109/nems.2018.8557009

2018-01-01

Abstract:This paper reports an integrated forward-view 2-axis MEMS scanner that enables ultrasmall 3D LiDAR for applications in micro-air vehicles (MAV). A new design of a pair of vertically-oriented 2-axis scanning MEMS scanner is proposed and fabricated using an innovative fabrication process. Such MEMS scanners are integrated on a silicon optical bench and bent vertically to the substrate, thus forward scan is realized without any beam-folding mirrors. The mirror plate is 0.7 mm × 0.7 mm. The measured optical scan range reaches 17° in both axes at only 4.5 V. The measured resonance frequency of the angular scanning mode is 2.2 kHz. Good optical alignment for LiDAR scanners can be achieved without extra alignment efforts. This MEMS mirror allows a forward-view LiDAR scanner to be monolithically integrated and aligned on a single chip.
Optical Design of a New Folding Scanning System in MEMS-based Lidar

Xiaobao Lee,Chunhui Wang,Zhaoxu Luo,Shengqing Li

DOI: https://doi.org/10.1016/j.optlastec.2019.106013

IF: 4.939

2019-01-01

Optics & Laser Technology

Abstract:In order to solve the two disadvantages, serious divergence and limited scanning angle, of the traditional optical angle expansion in MEMS-based scanning system, a new method is proposed, i.e. an f-theta lens group and a wide-angle lens group are added into the traditional one. Principle of the optical angle expansion is discussed, while the relationship between emergent angle and incident angles has been given. Employing the optical design software ZEMAX, a folding scanning optical system based on MEMS mirror is designed thereafter. The folding scanning optical system we designed can not only scan in a large angle field, which is greater than 60 degrees, but also obtain small spot size at distance of about 160 m, where the spot size is less than 10 cm. This folding scanning optical system has a significant application value in 3D imaging lidar system.
Wide Angle and High Frequency Resonant Piezoelectric MEMS Mirror for Laser Beam Scanning Application

Hung-Yu Lin,Hao-Chien Cheng,Shih-Chi Liu,Chih-Chen Hsu,Si-Han Chen,Mingching Wu,Kai-Chih Liang,Mei-Feng Lai,Weileun Fang

2023-01-01

Abstract:This study designs and realizes a piezoelectric MEMS scanning mirror with large scan angle and high frequency for high-resolution laser beam scanning displays. In Fig. 1 a, this design has three merits: (1) wing-shaped actuators: to serve as the pure torque generator to drive the torsional spring and mirror (1.2mm) with good linearity (since no axial/transverse loads), (2) wing-shaped actuators: to localize the energy at torsional-spring and mirror to achieve large scan angle (at the scanning mode); (3) optimal supporting spring: to suppress the mode coupling and further to lower the stress during scanning. Thus, large scan angle at high scanning frequency is achieved. Measurements demonstrate the scanner has an optical scan angle of 70-degree (mechanical scan angle of ±17.5-degree) at the resonant frequency of 37.7kHz (no vacuum required), which can reach target resolution 1080P, with a unipolar driving voltage of 20V. As summarized in Fig. 7, compared with existing scanners, the performance of the presented one is competitive in FOM (optical scan angle (θ) × mirror size (D)) when driving at resonant frequency.
A Large Aperture 2-Axis Electrothermal MEMS Mirror for Compact 3D LiDAR

Dingkang Wang,Connor Watkins,Medini Aradhya,Sanjeev Koppal,Huikai Xie

DOI: https://doi.org/10.1109/omn.2019.8925039

2019-01-01

Abstract:Low-cost LiDAR with long distance, high resolution, and stable laser scanning are needed for robotics and automobiles. This paper reports a large-aperture, 2-axis electrothermal MEMS mirror for LiDAR applications. The MEMS mirror has a mirror plate of 2 × 2.5 mm 2 and an optical field view (FoV) of 15° by 12°. The beam divergence of 0.5 mrad is achieved with a 1.3-mm laser beam. The rotational scanning resonant mode is at 0.7 kHz, which is achieved by the meshed bimorph actuators with improved stiffness.
A Wide-Angle Immersed Mems Mirror And Its Application In Optical Coherence Tomography

Xiaoyang Zhang,Liang Zhou,Can Duan,Dong Zheng,Sanjeev Koppal,Quentin Tanguy,Huikai Xie

DOI: https://doi.org/10.1109/OMN.2016.7565908

2016-01-01

Abstract:In this paper we report a wide-angle two-axis electrothermal MEMS scanning mirror and its application in optical coherence tomography (OCT). The wide-angle scanning was achieved by combining the large scan range of the MEMS mirror and the "Snell's Window" effect. By immersing the electrothermal MEMS mirror into a mineral oil, the original 32 degrees field of view (FOV) can be increased up to about 75 degrees. The wide-angle immersed mirror was employed in an OCT system and 3D OCT images were successfully obtained.
Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning

Qiang Wang,Weimin Wang,Xuye Zhuang,Chongxi Zhou,Bin Fan

DOI: https://doi.org/10.3390/mi12040378

IF: 3.4

2021-04-01

Micromachines

Abstract:Microelectromechanical System (MEMS)-based scanning mirrors are important optical devices that have been employed in many fields as a low-cost and miniaturized solution. In recent years, the rapid development of Light Detection and Ranging (LiDAR) has led to opportunities and challenges for MEMS scanners. In this work, we propose a 2D electrostatically actuated micro raster scanner with relatively large aperture. The 2D scanner combines a resonant scanning axis driven by an in-plane comb and a quasistatic scanning axis driven by a vertical comb, which is achieved by raising the moving comb finger above the fixed comb finger through the residual stress gradient. The analytic formula for the resonant axis frequency, based on the mechanical coupling of two oscillation modes, is derived and compared with finite element simulation. A prototype is designed, fabricated, and tested, and an overall optical Field-of-View (FoV) of about 60° × 4° is achieved. Finally, some possibilities for further improvement or optimization are discussed.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
MEMS mirror based omnidirectional scanning for lidar optical systems

Qingyan Li,Yu Zhang,Rundong Fan,Yue Wang,Yu Wang,Chunhui Wang

DOI: https://doi.org/10.1016/j.optlaseng.2022.107178

IF: 5.666

2022-01-01

Optics and Lasers in Engineering

Abstract:•We design a new type of catadioptric panoramic scanning optical system with a simple structure and small volume suitable for MEMS micro-mirror scanning lidar.•A detailed theoretical derivation and optical path analysis of the design are given.•The performance of omnidirectional scanning lidar optical system can well meet the actual needs and solve the problems of solid-state, miniaturization, and omnidirectional scanning imaging of lidar.
Three-dimensional Confocal Scanning Microscope Using an MEMS Mirror for Lateral Scan and an MEMS Lens Scanner for Depth Scan

Lin Liu,Huikai Xie

DOI: https://doi.org/10.1109/omems.2012.6318851

2012-01-01

Abstract:We present a three-dimensional confocal scanning microscope using MEMS scanners for both the lateral and the axial scan. The lateral scan is performed by an electrothermal two-axis MEMS mirror that is capable of scanning large angles up to ± 20° at low driving voltages less than 4.5 V. The depth scan is accomplished by an electrothermal lens scanner with a large tunable range of 475 μm at 3 V. 2D and 3D confocal images have been obtained by this system.
A 2D Resonant MEMS Scanner with an Ultra-Compact Wedge-Like Multiplied Angle Amplification for Miniature LIDAR Application

Liangchen Ye,Gaofei Zhang,Zhen You,Chi Zhang

DOI: https://doi.org/10.1109/icsens.2016.7808932

2016-01-01

Abstract:In this paper, we propose a two-dimensional resonant MEMS scanning mirror with an integrated ultra-compact multiplied angle amplification for miniature LIDAR application. A wedge-like structure is designed to magnify scanning angle of a 2D MEMS scanner which can also reduce driving voltage, decrease maximum stress and increase reliability and life. Compared with other angle amplification, the wedge does not consist of any complex optical lens or structures. The amplification is more compact than former that only 1mm increasing in height of package is needed for enlarging angle. A double scanning angle amplification is experimented. Appling a voltage of 12.5V peak-to-peak(7.5Vac at frequency of 710Hz and 5Vac at frequency of 997Hz) results in optical scan of 45.3° in x-axis and 42.6° in y-axis at atmosphere pressure which is rather low driving voltage for 2D resonant MEMS scanner at present.

A compact MEMS-based wide-angle optical scanner

Design and Fabrication of a Forward View Scanner on SiOB with Latch Structure for Improved Vertical Orientation

A Monolithic Forward-View Optical Scanner by a Pair of Upright MEMS Mirrors on a SiOB for LiDAR Applications

A Compact Omnidirectional Laser Scanner Based on an Electrothermal Tripod Mems Mirror for Lidar Please Leave

A Monolithic Forward-View MEMS Laser Scanner with Decoupled Raster Scanning and Enlarged Scanning Angle for Micro LiDAR Applications

Wide-Angle Structured Light with A Scanning Mems Mirror in Liquid

A Silicon Optical Bench-Based Forward-View Two-Axis Scanner for Microendoscopy Applications

A 2-Axis MEMS Scanning Micromirror with a 45° Auto-Positioning Mechanism for Endoscopic Probe

Design and Realization of Wide Field-of-View 3D MEMS LiDAR

Low-voltage Wide-Field-of-view Lidar Scanning System Based on a MEMS Mirror.

Design Study of a Large-Angle Optical Scanning System for MEMS LIDAR

Wide angle LiDAR demonstrator based on a resonantly operated 1D MEMS mirror capable of scanning 180°

An Integrated Forward-View 2-Axis Mems Scanner for Compact 3D Lidar

Optical Design of a New Folding Scanning System in MEMS-based Lidar

Wide Angle and High Frequency Resonant Piezoelectric MEMS Mirror for Laser Beam Scanning Application

A Large Aperture 2-Axis Electrothermal MEMS Mirror for Compact 3D LiDAR

A Wide-Angle Immersed Mems Mirror And Its Application In Optical Coherence Tomography

Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning

MEMS mirror based omnidirectional scanning for lidar optical systems

Three-dimensional Confocal Scanning Microscope Using an MEMS Mirror for Lateral Scan and an MEMS Lens Scanner for Depth Scan

A 2D Resonant MEMS Scanner with an Ultra-Compact Wedge-Like Multiplied Angle Amplification for Miniature LIDAR Application