Wide angle LiDAR demonstrator based on a resonantly operated 1D MEMS mirror capable of scanning 180°

Leon Pohl,Fabian Schwarz,Peter Blicharski,Christian Janicke,Oleg Petrak,Thomas von Wantoch,Ulrich Hofmann

DOI: https://doi.org/10.1117/12.2578151

2021-03-05

Abstract:The wish for higher-level advanced driver assistance systems requires infrared based ranging systems like LiDAR provided that it offers high speed, wide field-of-view, small size and especially low cost. The only way to combine these attributes is the use of cost-efficient and mass-producible MEMS scanners suitable for automotive applications. In this work we present a wide-angle LiDAR demonstrator for short range applications based on a single resonantly operated MEMS, a single laser and single light detector. The MEMS mirror is capable of tilting 45 mechanically and thus enabling a large field-of-view of up to 180. The incorporated mirror plate has an elliptical shape of 2 mm x 4 mm in size and the overall volume of the MEMS device is less than 0.7 cm3. Low-power microcontroller based closed-loop electronics is used to keep the very high Q device within its resonance frequency range at all times enabling high scan rates of more than 3000 scans per second and accurate position detection better than 0.1. Both automotive suitability and high energy efficiency is achieved by hermetic wafer-level sealing under vacuum as well as internal piezoelectric drive and sense structures. The demonstrated wide-angle scanning LiDAR further consists of a 905 nm eye-safe pulse laser source operating at up to 200 kHz with an optical peak output power of 30 W as well as a one-dimensional SPAD based detector with 2x192 channels. Together this leads to high density and high resolution point clouds using just a single laser, detector and MEMS scanner.