High-Performance GaN-Based LEDs on Si Substrates: The Utility of Ex Situ Low-Temperature AlN Template With Optimal Thickness

Haiyan Wang,Zhiting Lin,Yunhao Lin,Wenliang Wang,Guoqiang Li
DOI: https://doi.org/10.1109/TED.2017.2753844
IF: 3.1
2017-01-01
IEEE Transactions on Electron Devices
Abstract:Ex situ low-temperature (LT)-AlN templates are employed to realize GaN-based light-emitting diodes (LEDs) on Si substrates by the combination of pulsed laser deposition and metal organic chemical vapor deposition. The influence of ex situ LT-AlN template thickness on the properties and performance of as-grown LEDs has been carefully studied. The LED wafer grown on 70-nm-thick ex situ LT-AlN templa...
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