Correlation of Gate Capacitance with Drive Current and Transconductance in Negative Capacitance Ge PFETs

Jing Li,Jiuren Zhou,Genquan Han,Yan Liu,Yue Peng,Jincheng Zhang,Qing-Qing Sun,David Wei Zhang,Yue Hao
DOI: https://doi.org/10.1109/led.2017.2746088
IF: 4.8157
2017-01-01
IEEE Electron Device Letters
Abstract:Correlation of gate capacitance C-G with drive current I-DS and transconductance G(m) in negative capacitance (NC) Ge pFETs is first investigated. Hysteresis-free NC Ge pFETs integrated with 4.5-nm HZO achieving the improved I-DS and G(m) over the control devices are fabricated. A peak in the C-G versus gate voltage curve is demonstrated in the NC Ge pFET, indicating the NC effect induced by HZO film. It is observed that I-DS and G(m) of the NC transistors are enhanced as the C-G peak gets increased. This is attributed to the fact that, as the device operates in the NC region, both C-G and internal gate voltage amplification are proportional to C-FE/(C-FE + C-MOS), where C-FE and C-MOS are the NC of HZO and the MOS capacitance of the device, respectively.
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