Abstract:This paper presents characterization and compensation of the thermal bias drift of a MEMS accelerometer whose effective stiffness is electrostatically tuned to a low value with the help of the single-sided parallel plates (SSPPs) capacitors. A temperature drift model for the proposed accelerometer is built and the temperature effect on the mechanical stiffness and the circuit gains is characterized. The characterization reveals that the variations of the feedforward coefficient including the mechanical stiffness and the readout gain due to the temperature change play a significant role in the bias drift of output of the proposed closed-loop accelerometer. On the other hand, the variations of both feedback gain and tuning gain as a function of temperature are one-order-of-magnitude less than that of the feedforward coefficient. To calibrate the feedforward coefficient, an excitation signal as a form of AC reference displacement is introduced to drive the proof mass and the readout response is demodulated to calibrate the variance of the feedforward coefficient correspondingly. An open-loop compensation scheme for the temperature-induced bias drift using the variance of the calibrated response is proposed accordingly. Alternatively, the calibrated response can be controlled to a preset value by a new proportion integral derivative (PID) controller by the adjustment of the SSPP tuning voltage. The output of the PID controller is used for the calibration of the introduced bias from the electrostatic tuning force. Therefore, a closed-loop compensation of the thermal bias drift is achieved by remaining the feedforward coefficient while eliminating the calibrated bias. Experiments under a temperature cooling process and different tuning voltages are carried out to verify two proposed compensation schemes. The temperature drift coefficients (TDCs) of both compensated outputs exhibit at least one-order-of-magnitude reduction in response to the temperature change. When the effective stiffness of the accelerometer is tuned to about 4.19 N m(-1), the TDC of the compensated output using the proposed open-loop or closed-loop compensation schemes is reduced to about 0.1136 or 0.0391 mg degrees C-1, respectively and meanwhile, the Allan bias instability is slightly increased to 48.63 or 56.14 mu g, respectively.

Attenuation of the Dielectric Charging-Induced Drift in Capacitive Accelerometer by AC Bias Voltage

Temperature Bias Drift Phase-Based Compensation for a MEMS Accelerometer with Stiffness-Tuning Double-Sided Parallel Plate Capacitors

Characterization and Compensation of Thermal Bias Drift of a Stiffness-Tunable MEMS Accelerometer

Analysis of the Frequency-Dependent Vibration Rectification Error in Area-Variation-Based Capacitive MEMS Accelerometers.

Effects of Dielectric Charging on the Output Voltage of a Capacitive Accelerometer

A Stiffness-tunable MEMS Accelerometer with In-operation Drift Compensation

Drift of MEMS Closed-Loop Accelerometers Induced by Dielectric Charging

A Stiffness-Tunable MEMS Accelerometer

Temperature Drift Compensation of a Tuned Low Stiffness MEMS Accelerometer Based on Double-Sided Parallel Plates

A Real-Time Temperature Compensation Algorithm for a Force-Rebalanced MEMS Capacitive Accelerometer Based on Resonant Frequency.

Noise Behaviors of a Closed-Loop Micro-Electromechanical System Capacitive Accelerometer

Linear Parametric Amplification/attenuation for MEMS Vibratory Gyroscopes Based on Triangular Area-Varying Capacitors

An In-Plane Low-Noise Accelerometer Fabricated with an Improved Process Flow

Compensation for bias in capacitive micro accelerometer

Investigation of Drift Phenomena in Closed-Loop Capacitive Micro Accelerometers

Effects of Bias Voltage Polarity on Differential Capacitive Sensitive Devices

Analytical Study and Compensation for Temperature Drifts of a Bulk Silicon MEMS Capacitive Accelerometer

Linear Compensation to Thermal Bias Drift of MEMS Accelerometer Based on Temperature Measurement Circuit

Analytical Study of Temperature Coefficients of Bulk MEMS Capacitive Accelerometers Operating in Closed-Loop Mode

Analytical Study and Thermal Compensation for Capacitive MEMS Accelerometer with Anti-Spring Structure

Investigation of the Thermal Drift of MEMS Capacitive Accelerometers Induced by the Overflow of Die Attachment Adhesive