Abstract:For micro-electromechanical system (MEMS) resonators, once the devices are fabricated and packaged, their intrinsic quality factors (Q) will be fixed and cannot be changed, which seriously limits the further improvement of the resonator’s performance. In this paper, parametric excitation is applied in a push-pull driven disk resonator gyroscope (DRG) to improve its sensitivity by an electrical pump, causing an arbitrary increase of the “effective Q”. However, due to the differential characteristics of the push-pull driving method, the traditional parametric excitation method is not applicable. As a result, two novel methods are proposed and experimentally carried out to achieve parametric excitation in the push-pull driven DRGs, resulting in a maximum “effective Q” of 2.24 × 106 in the experiment, about a 7.6 times improvement over the intrinsic Q. Besides, subharmonic excitation is also theoretically analyzed and experimentally characterized. The stability boundary of parametric excitation, defined by a threshold voltage, is theoretically predicted and verified by related experiments. It is demonstrated that, when keeping the gyroscope’s vibration at a constant amplitude, the fundamental frequency driving voltage will decrease with the increasing of the parametric voltage and will drop to zero at its threshold value. In this case, the gyroscope operates in a generalized parametric resonance condition, which is called subharmonic excitation. The novel parametric and subharmonic excitation theories displayed in this paper are proven to be efficient and tunable dynamical methods with great potential for adjusting the quality factor flexibly, which can be used to further enhance the resonator’s performance.

Influences of the Structure Parameters on Sensitivity and Brownian Noise of the Disk Resonator Gyroscope

An Investigation on the Ring Thickness Distribution of Disk Resonator Gyroscope with High Mechanical Sensitivity

Effects of Structural Dimension Variation on the Vibration of MEMS Ring-Based Gyroscopes

The Mechanical Sensitivity Optimization of A Disk Resonator Gyroscope with Mutative Ring Thickness

Structure Design and Structural Parameter Optimization of Fully Symmetric Vibratory Gyroscope

Study of the Influence of Phase Noise on the MEMS Disk Resonator Gyroscope Interface Circuit

Design, Fabrication and Characterization of Disk Resonator Gyroscope with Vibration and Shock Resistance

Simulation Optimization of Mechanical Sensitivity of Disc Resonant Gyroscope

Dynamic Resonance Characteristic Analysis of Fiber Ring Resonator

Nonlinear Modal Interactions and Internal Resonance in a Micromachined Disk Resonator

Dynamic Modeling of the Multiring Disk Resonator Gyroscope

Sensitivity analysis and structure design for tri-mass structure micromachined gyroscope

Vibration Modeling of Disk Resonator Gyroscope by Wave Propagation

A Mode Order Optimized Disk Resonator Gyroscope Considering Thermoelastic Damping

Characteristic Analysis of Noise in a Resonator Optic Gyroscope (ROG) Using a Feedback Loop

Analysis of Parametric and Subharmonic Excitation in Push-Pull Driven Disk Resonator Gyroscopes

Design of a Novel Gear-Like Disk Resonator Gyroscope with High Mechanical Sensitivity

Determination of the ring resonator's parameters in integrated optics gyroscopes

Thermoelastic Quality-Factor Enhanced Disk Resonator Gyroscope

Design optimization of BAW micro-piezoelectric disk gyroscope through finite element method

Study of Intrinsic Dissipation Due to Thermoelastic Coupling in Gyroscope Resonators