Abstract:Fused silica is widely used in aerospace and precision integrated micro-optical sensors due to its high hardness, low coefficient of thermal expansion, high transmittance properties and high chemical stability in harsh environments. Due to the amorphous characteristics, fused silica wet etching is isotropic and cannot realize specific structural functional devices; dry etching process is complex, costly, and relatively low productivity. These characteristics make the processing of fused silica extremely difficult, with high cost and low yield. Femtosecond laser processing has been widely used in the processing of complex and fine three-dimensional structure of fused silica due to its wide adaptability of materials, high degree of processing fineness and non-mask processing technology, but the surface of the processed surface is relatively rough. Fine micro-optical devices can be realized by wet-assisted femtosecond laser processing. In this study, microstructural patterns were fabricated on fused silica using a tightly focused femtosecond laser by means of a self-developed ultrafast laser processing instrumentation. By controlling the laser processing parameters and the etching time of HF solution to realize the precise modulation of linewidth, period and height of the grating, one/two dimensional gratings, and the Fresnel zone plates with circular and elliptical focal points and the biomimetic compound eye microlens array were successfully fabricated. Finally, the performance of the fabricated optical components were characterized, which were comparable to theoretical simulation values. The results show that the total diffraction efficiency of the fused silica gratings fabricated using this method reaches 85.5%; the Fresnel zone plates and the bionic compound eye microlens array have good focusing effects. This study provides a reference method for the fine micromachining of hard materials such as fused silica, and provides a theoretical basis for its engineering application.

Dry-etching-assisted femtosecond laser machining

Dry‐etching‐assisted Femtosecond Laser Machining (laser Photonics Rev. 11(3)/2017)

Silicon Three-Dimensional Structures Fabricated by Femtosecond Laser Modification with Dry Etching

Etching-assisted Femtosecond Laser Microfabrication

Etching-assisted femtosecond laser modification of hard materials

Ultra-smooth micro-optical components of various geometries.

Femtosecond laser workstation and micro-scale machining

Manufacturing of Functional Polymer Micro- and Nano-Structures by Femtosecond Laser Pulse

Application of Femtosecond Laser Irradiation and Wet Etching in Fabrication of Microstructures in Crystal Materials

Precise and Smooth Structure on Inp Fabricated by Femtosecond Laser Direct Writing-Assisted Wet Etching

Controllable Micro/Nano Structure Surface Fabricated by Femtosecond Laser and Its Applications

Simultaneously eliminate defects and modify surface for 3d printed components using femtosecond laser

Micro/Nano Periodic Surface Structures and Performance of Stainless Steel Machined Using Femtosecond Lasers

Cylindrically Focused Nonablative Femtosecond Laser Processing of Long‐Range Uniform Periodic Surface Structures with Tunable Diffraction Efficiency

Research of Femtosecond Laser-Assisted Etching of Fused Silica Micro-Optics Devices

Micro-nano fabrication of femtosecond laser wet etch

Metal surface structuring with spatiotemporally focused femtosecond laser pulses

Rapid Fabrication of High-Resolution Multi-Scale Microfluidic Devices Based on the Scanning of Patterned Femtosecond Laser.

Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale

Femtosecond laser micromachining optical devices

Fiber Laser Irradiation in Chemical Solution for Micro Fabrication: Mechanisms and Applications