Abstract:Phase noise is an essential performance indicator for microelectromechanical system (MEMS) resonant accelerometers. The optimal resolution achievable is limited by the close-to-the carrier phase noise resulting from the modulation of noise sources by the mechanical resonator and driving circuit. Compared with the frequently used automatic gain control (AGC) circuit, the non-AGC scheme is more concise and can avoid the additional frequency flicker noise and 1/f 5 phase noise introduced by the AGC module. Although the mechanisms of these two kind of control loops are well-known by the communities, the phase noise modelling study on the non-AGC loop, especially compared with that of AGC loop is insufficient. This paper established a phase noise model for the AGC and non-AGC closed loop circuit of MEMS resonant accelerometer. The model includes the effects of resonator thermal noise, random loading noise of proof masses, front-circuit noise, comparator noise, AGC noise and amplitude stiffness coupling on the output noise spectrum of the resonant accelerometer. This paper carries the noise analysis through a behaviour level simulation with Simulink. The measured frequency power spectral density and Allan variance are very close to the theoretical predictions, which verifies the effectiveness of the phase noise model. The test results show that the white noise and the bias instability of the silicon resonant accelerometer are 837 ng (√Hz)−1 and 140 ng respectively, which are in good agreement with the model prediction results.

Enhanced Frequency Stability In A Non-Linear Mems Oscillator Employing Phase Feedback

Adaptive Frequency-stabilization of MEMS Oscillators Using Mode Coupling

One-time Frequency Sweep to Eliminate IQ Coupling in MEMS Vibratory Gyroscopes

Phase-delay Induced Variation of Synchronization Bandwidth and Frequency Stability in a Micromechanical Oscillator

A Sub-0.1°/H Bias-Instability MEMS Gyroscope Using Resonant Constant-Frequency Driving Technique

A 0.09°/h Bias-Instability MEMS Gyroscope Working with a Fixed Resonance Frequency

Effects of Phase Delay on Synchronization in a Nonlinear Micromechanical Oscillator

Frequency Stabilization of an Optoelectronic Oscillator Based on Phase-Locked-Loop

A 40 Nm Cmos V-Band Vco with On-Chip Body Bias Voltage Control Technique

Reduction of High-Frequency Laser Noise in Resonant Fiber Optic Gyroscope with a Phase-Modulated Feedback Loop

A Frequency-Stable Optoelectronic Oscillator Based on Passive Phase Compensation

Frequency Stability Optimization of an OEO Using Phase-Locked-loop and Self-Injection-locking

FREQUENCY STABILITY OF MICROMECHANICAL BEAM OSCILLATOR UNDER SUBHARMONIC SYNCHRONIZATION

A Sub-µg Bias-Instability MEMS Oscillating Accelerometer with an Ultra-Low-Noise Read-Out Circuit in CMOS

A Background Test and Calibration Technique of Nonlinear Mismatches in MEMS Oscillating Accelerometers

Slip-oscillate response in a synchronizing nonlinear micro-resonator

Frequency stabilization of self-sustained oscillations in a sideband-driven electromechanical resonator

Analysis and Design Considerations for Achieving the Fundamental Limits of Phase Noise in mmWave Oscillators With On-Chip MEMS Resonator

Surpassing fundamental limits of oscillators using nonlinear resonators

MEMS Huygens Clock Based on Synchronized Micromechanical Resonators

Phase Noise Modelling of MEMS Resonant Accelerometer with Non-Agc-driven Circuit