Ring Resonator-Based Optical Hydrogen Sensor

Ya Sha Yi,Da Chuan Wu,Poonam Birar,Zhi Yang
DOI: https://doi.org/10.1109/JSEN.2017.2669521
IF: 4.3
2017-01-01
IEEE Sensors Journal
Abstract:We have proposed and demonstrated numerically a ultra-small and highly sensitive hydrogen sensor, based on micro ring resonator with a footprint size as small as 4×4 μm2. With a palladium or platinum hydrogen sensitive layer coated on the inner surface of the micro ring resonator, the device is highly sensitive to the low hydrogen concentration variation and the sensitivity is at least one magnitu...
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