Abstract:The Micro Electro Mechanical Systems (MEMS) density sensor is developed to achieve in-situ measurement of fluid density rapidly. The sensor's sensitive chip with a rectangular microcantilever is fabricated using MEMS technology. In the sensitive chip, an Au coil and four piezoresistors are fabricated on the rectangular microcantilever. When the sensitive chip is placed in the uniform magnetic field and the Au coil is powered with alternating input-voltage, the alternating Lorentz force is generated to drive the microcantilever to vibrate. Then, the powered Wheatstone full bridge consisting of four piezoresistors generates alternating output-voltage based on the piezoresistive effect. The sensor is tested when it is immerged in the silicone oil and in air under local atmospheric pressure. According to the experiment results, it is found that the data of alternating input-voltage of Au coil and alternating output-voltage of the Wheatstone bridge have a linear relationship. The linear function can be fitted easily through least-squares fitting to obtain slope and intercept. We also discover that every slope is inversely proportional to the corresponding fluid density. Hence, the fluid density can be measured rapidly by the calculated slope. The experimental results show that the absolute deviations of the measured densities from the reference densities are <0.8%.

Density Measurement Sensitivity of Micro-Cantilevers Influenced by Shape Dimensions and Operation Modes

A MEMS Resonant Sensor to Measure Fluid Density and Viscosity under Flexural and Torsional Vibrating Modes

DENSITY MEASUREMENT PERFORMANCE IN FLOWING LIQUID USING MICROCANTILEVER-BASED RESONATORS UNDER BENDING AND TORSION VIBRATIONS

Simulation and Design of Piezoelectric Microcantilever Chemical Sensors

A Trapezoidal Cantilever Density Sensor Based on MEMS Technology

Characterization of higher-order resonant cantilevers for density determination in different flowing liquids

Temperature Compensation In Fluid Density Measurement Using Micro-Electromechanical Resonant Sensor

Simulation of SiO2-based Piezoresistive Microcantilevers

Fabrication and Characterization of Sio2 Microcantilever for High Sensitive Moisture Sensor

Resonant Frequency of the Rectangular Micro-Cantilever in Fluid-Structure Interaction

A Novel Slope Method for Measurement of Fluid Density with a Micro-cantilever under Flexural and Torsional Vibrations.

A MEMS fluid density sensor based on trapezoidal cantilever

A MEMS density sensor based on mircro-rectangular cantilever

In-Situ Measurement of Fluid Density Rapidly Using a Vibrating Piezoresistive Microcantilever Sensor Without Resonance Occurring

A Novel Piezoelectric Resonator for Liquid Density and Viscosity Measurement

Simulation-Based Design and Optimization of Rectangular Micro-Cantilever-Based Aerosols Mass Sensor.

Surface Stress-Induced Deflection of A Microcantilever with Various Widths and Overall Microcantilever Sensitivity Enhancement Via Geometry Modification

A Fluid Viscosity Sensor with Resonant Trapezoidal Micro Cantilever

Simplified Aeroelastic Model for Fluid Structure Interaction Between Microcantilever Sensors and Fluid Surroundings

Study on Sensitivities of Microcantilever Chemical Sensors

Determination of Fluid Density and Viscosity by Analyzing Flexural Wave Propagations on the Vibrating Micro-Cantilever