Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

Microsteganography on WS2 Monolayers Tailored by Direct Laser Painting

Laser Direct Writing Using Submicron-Diameter Fibers.

Enhancement of the Monolayer Tungsten Disulfide Exciton Photoluminescence with a Two-Dimensional Material/Air/Gallium Phosphide In-Plane Microcavity.

Micro-Fabrication and Monitoring of Three-Dimensional Microstructures Based on Laser-Induced Thermoplastic Formation

Giant Enhancement of Photoluminescence Emission in Monolayer WS2 by Femtosecond Laser Irradiation

Ultra-sensitive nanometric flat laser prints for binocular stereoscopic image

Concealing Messages at the Atomic‐Thin Level by Reaching the Limit of Writing

Unraveling the synergetic mechanism of physisorption and chemisorption in laser-irradiated monolayer WS2

Femtosecond Laser‐Driven Phase Engineering of WS2 for Nano‐Periodic Phase Patterning and Sub‐ppm Ammonia Gas Sensing

Maskless Micro/Nanopatterning and Bipolar Electrical Rectification of MoS2 Flakes Through Femtosecond Laser Direct Writing

Laser-Splashed Three-Dimensional Plasmonic Nanovolcanoes for Steganography in Angular Anisotropy

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

Real-Time Diagnostics of 2D Crystal Transformations by Pulsed Laser Deposition: Controlled Synthesis of Janus WSSe Monolayers and Alloys.

Enhanced Photoluminescence of Solution-Exfoliated Transition Metal Dichalcogenides by Laser Etching

Femtosecond Laser Nano/microfabrication Via Three-Dimensional Focal Field Engineering

Direct in Situ Fabrication of Multicolor Afterglow Carbon Dot Patterns with Transparent and Traceless Features via Laser Direct Writing

Monolayer Tungsten Disulfide Laser

Laser-patterned submicron Bi2Se3-WS2 pixels with tunable circular polarization at room temperature

Surface Coloring and Plasmonic Information Encryption at 50000 dpi Enabled by Direct Femtosecond Laser Printing

Dynamic Structural Color Display Based on Femtosecond Laser Variable Polarization Processing

Dynamically Taming Focal Fields of Femtosecond Lasers for Fabricating Microstructures