Abstract:The electrostatic pull-in instability (EPI), within the framework of the nanoelectromechanical systems (NEMS) has been shown as a robust and versatile method for characterizing mechanical properties of nanocantilevers. This paper aims to investigate the surface effects, specifically residual surface stress and surface elasticity, on the EPI of micro and nano-scale cantilevers as well as double clamped beams. Since the cantilever has one end free, it has no residual stress, thus the strain-independent component of the surface stress or intrinsic surface stress has no influence on the EPI, as long as it has small deformation. The strain-dependent component of the surface stress or surface elasticity changes the bending stiffness of the cantilever and, consequently, induces shifts in the EPI. For double clamped beams, the effective residual surface stress comes into play and modifies the effective residual stress of the beam. The nonlinear electromechanical coupled equations, which take into account the surface effects are solved numerically. The theoretical results presented in this paper indicate that the EPI is very sensitive to the surface effects, especially when a double clamped beam is employed. The results show that the influence of surface effects on the EPI of cantilevers become more profound when the thickness is below 50 nm, while the influence on double clamped beams is significant even at sub-micron scale. The present study can provide helpful insights for the design and characterization of NEMS switches. Moreover, the results can be used to provide the proof of concepts of a new surface stress sensing method using EPI in nanomechanical sensor systems.

Thermal and Surface Effects on the Pull-in Characteristics of Circular Nanoplate NEMS Actuator Based on Nonlocal Elasticity Theory

RESEARCH ON PULL-IN AND RELEASE PHENOMENON OF ELECTROSTATIC MICROPUMPS

Dynamic Instability and Bifurcation of Electrically Actuated Circular Nanoplate Considering Surface Behavior and Small Scale Effect

Transient Pull-In Analysis of Micro-Plate with Fluid-Structure Interactions

Nonlinear Pull-in Instability and Free Vibration of Micro/nanoscale Plates with Surface Energy – A Modified Couple Stress Theory Model

Scale-dependent Pull-in Instability of Functionally Graded Carbon Nanotubes-Reinforced Piezoelectric Tuning Nano-Actuator Considering Finite Temperature and Conductivity Corrections of Casimir Force

Pull-in Instability and Vibration of Quasicrystal Circular Nanoplate Actuator Based on Surface Effect and Nonlocal Elastic Theory

Pull-in Instability of Carbon Nanotube-Reinforced Nano-Switches Considering Scale, Surface and Thermal Effects

Surface energy and thermal stress effect on nonlinear vibration of electrostatically actuated circular micro-/nanoplates based on modified couple stress theory

Surface effect on the pull-in instability of cantilevered nano-switches based on a full nonlinear model

Influence of Surface Energy on the Pull-in Instability of Electrostatic Nano-Switches

Bending and Free Vibration of a Circular Magnetoelectroelastic Plate with Surface Effects

Bending and Vibration of an Electrostatically Actuated Circular Microplate in Presence of Casimir Force

Electromechanical Coupling Characteristics of Carbon Nanotube Reinforced Cantilever Nano-Actuator

Influence of Surface Energy on the Non-Linear Pull-In Instability of Nano-Switches

Effects of geometric nonlinearity on the pull-in instability of circular microplates based on modified strain gradient theory

Electrostatic pull-in instability in MEMS/NEMS: A review

Small Scale Effect on the Pull-in Instability and Vibration of Graphene Sheets

Surface stress effects on the electrostatic pull-in instability of nanomechanical systems

Bending of Circular Nanoplates with Consideration of Surface Effects

PULL-IN STABILITY OF TORSIONAL MEMS/NEMS ACTUATORS WITH THE EFFECTS OF CAPILLARY FORCE