Abstract:Logic switches enabled by nanoelectromechanical systems (NEMS) offer abrupt on/off-state transition with zero off-state leakage and minimal subthreshold swing, making them uniquely suited for enhancing mainstream electronics in a range of applications, such as power gating, high-temperature and high-voltage logic, and ultralow-power circuits requiring zero standby leakage. As NEMS switches are scaled with genuinely nanoscale gaps and contacts, quantum mechanical electrodynamic force (EDF) takes an important role and may be the ultimate cause of the plaguing problem of stiction. Here, combined with experiments on three-terminal silicon carbide (SiC) NEMS switches, a theoretical investigation is performed to elucidate the origin of EDF and Casimir effect leading to stiction, and to develop a stiction-mitigation design. The EDF calculation with full Lifshitz formula using the actual material and device parameters is provided. Finite element modeling and analytical calculations demonstrate that EDF becomes dominant over elastic restoring force in such SiC NEMS when the switching gap shrinks to a few nanometers, leading to irreversible stiction at contact. Artificially corrugated contact surfaces are designed to reduce the contact area and the EDF, thus evading stiction. This rational surface engineering reduces the EDF down to 4% compared with the case of unengineered, flat contact surfaces.

Pull-in Instability of Carbon Nanotube-Reinforced Nano-Switches Considering Scale, Surface and Thermal Effects

Tunable Electromechanical Coupling of a Carbon Nanotube-Reinforced Variable Cross-Section Nanoswitch with a Piezoelectric Effect

Influence of Surface Energy on the Pull-in Instability of Electrostatic Nano-Switches

Surface effect on the pull-in instability of cantilevered nano-switches based on a full nonlinear model

Influence of Surface Energy on the Non-Linear Pull-In Instability of Nano-Switches

Scale-dependent Pull-in Instability of Functionally Graded Carbon Nanotubes-Reinforced Piezoelectric Tuning Nano-Actuator Considering Finite Temperature and Conductivity Corrections of Casimir Force

Electromechanical Coupling Characteristics of Carbon Nanotube Reinforced Cantilever Nano-Actuator

Thermal and Surface Effects on the Pull-in Characteristics of Circular Nanoplate NEMS Actuator Based on Nonlocal Elasticity Theory

Instability Analysis of Quasicrystal Nano-Switch with Thermal Effect and Surface Distributed Forces

A general model for nano-cantilever switches with consideration of surface effects and nonlinear curvature

Coupling Influences of Nonlocal Stress and Strain Gradients on Dynamic Pull-In of Functionally Graded Nanotubes Reinforced Nano-Actuator with Damping Effects

Pull-in features of nanoswitches in the Casimir regime with account of contact repulsion

Design and Modeling of Carbon Nanotube Electromechanical Switches for Logic Device Application

Pull-In Instability of Micro-Switch Actuators: Model Review

Fabrication of A Nanoelectromechanical Switch Using A Suspended Carbon Nanotube

Electrodynamic Force, Casimir Effect, and Stiction Mitigation in Silicon Carbide Nanoelectromechanical Switches.

Scale-Dependent Dynamic-Pull-In of Functionally Graded Carbon Nanotubes Reinforced Nanodevice with Piezoelectric Layer

Dynamic Instability and Bifurcation of Electrically Actuated Circular Nanoplate Considering Surface Behavior and Small Scale Effect

Nanoelectromechanical Switches with Vertically Aligned Carbon Nanotubes

Nonlinear Pull-in Instability and Free Vibration of Micro/nanoscale Plates with Surface Energy – A Modified Couple Stress Theory Model

Material and Structural Instabilities of Single-Wall Carbon Nanotubes