Simultaneous Prediction for Multiple Key Performance Indicators in Semiconductor Wafer Fabrication

Zhengcai Cao,Xuelian Liu,Jinghua Hao,Min Liu
DOI: https://doi.org/10.1049/cje.2016.11.001
IF: 1.019
2016-01-01
Chinese Journal of Electronics
Abstract:The prediction and key factors identification for lot Cycle time (CT) and Equipment utilization (EU) which remain the Key performance indicators (KPI) are vital for multi-objective optimization in semiconductor manufacturing industry. This paper proposes a prediction methodology which predicts CT and EU simultaneously and identifies their key factors. Bayesian neural network (BNN) is used to estab...
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