Abstract:Direct writing utilizing a focused electron beam constitutes an interesting alternative to resist-based techniques, as it allows for precise and flexible growth onto any conductive substrate in a single-step process. One important challenge, however, is the identification of appropriate precursors which allow for deposition of the material of choice, e.g., for envisaged applications in nano-optics. In this regard the coinage metal silver is of particular interest since it shows a relatively high plasma frequency and, thus, excellent plasmonic properties in the visible range. By utilizing the precursor compound AgO2Me2Bu, direct writing of silver-based nanostructures via local electron beam induced deposition could be realized for the first time. Interestingly, the silver deposition was strongly dependent on electron dose; at low doses of 30 nC/μm2 a dominant formation of pure silver crystals was observed, while at higher electron doses around 104 nC/μm2 large carbon contents were measured. A scheme for the enhanced silver deposition under low electron fluxes by an electronic activation of precursor dissociation below thermal CVD temperature is proposed and validated using material characterization techniques. Finally, the knowledge gained was employed to fabricate well-defined two-dimensional deposits with maximized silver content approaching 75 at. %, which was achieved by proper adjustment of the deposition parameters. The corresponding deposits consist of plasmonically active silver crystallites and demonstrate a pronounced Raman signal enhancement of the carbonaceous matrix.

Laser Direct Writing of Silver Nanowire with Amino Acids-Assisted Multiphoton Photoreduction

Silver Nanowires for Reconfigurable Bloch Surface Waves

Laser-induced Single Point Nanowelding of Silver Nanowires

Three-dimensional silver nanowiring by femtosecond laser-induced photoreduction from solution

Laser-Direct Writing of Silver Nanostructure on Transparent Substrates by Femtosecond Laser with High SERS

Electronic Nanostructures: Constructing Metal Arch Nanobridges Utilizing a Photothermal‐Induced Nanobonding Technique (adv. Electron. Mater. 7/2019)

Controllable Assembly of Silver Nanoparticles Induced by Femtosecond Laser Direct Writing

Constructing Metal Arch Nanobridges Utilizing a Photothermal‐Induced Nanobonding Technique

Two-Dimensional Silver Structures Fabricated by Two-Photon Femtolaser

Precise Assembly and Joining of Silver Nanowires in Three Dimensions for Highly Conductive Composite Structures

Laser Direct Writing of Graphene Nanostructures Beyond the Diffraction Limit by Graphene Oxidation

Assembly of Silver Nanoparticles on Nanowires into Ordered Nanostructures with Femtosecond Laser Radiation

Femtosecond laser trapping nanoprinting of silver micro/nanostructures

Nanosecond-Laser-Based Charge Transfer Plasmon Engineering of Solution-Assembled Nanodimers.

Direct Writing Nanostructures on Au Nano-Film by Laser Irradiating Cantilevered Scanning Near-Field Optical Microscope Tip

Structural and chemical study of complex silver patterns additively manufactured by multi-photon reduction

Far‐Field Parallel Direct Writing of Sub‐Diffraction‐Limit Metallic Nanowires by Spatially Modulated Femtosecond Vector Beam

Direct pen writing and atomic-scale molecular dynamics simulation study of a novel silver nano-ink

Direct Electron Beam Writing of Silver-Based Nanostructures

Joining of Silver Nanowires by Femtosecond Laser Irradiation Method

Femtosecond Laser Direct Writing of Ion Exchangeable Multifunctional Microstructures.