Abstract:Low-temperature epitaxy of ZnO films was carried out on both Si(00 1) and silica substrates by reactive e-beam evaporation. Growth temperature was varied between 100 degrees C and 450 degrees C. The optimal growth temperatures were between 200 degrees C and 300 degrees C for Si(00 1) substrates and 300 degrees C and 350 degrees C for silica, respectively. Structural and optical characteristics grown on both of Si and silica were compared by measurements of X-ray diffraction, Raman scattering and photoluminescence excitation (PLE) spectroscopy. X-ray diffraction showed the ZnO films grown both on Si(00 1) and silica substrates were all highly c-axis-oriented and their linewidth of (002) diffraction peak is significantly smaller than that measured from ZnO films deposited by magnetron sputtering. However, Raman scattering demonstrated the presence of excess zinc in the ZnO/silica structure. PLE measurements exhibited the sharp band-absorption edge and exciton absorption in the ZnO films on Si(00 1) and poor optical properties of ZnO on silica. PLE also revealed that the absorption characteristic near the band edge remarkably changed with the variation of oxygen content in the ZnO lattice while X-ray diffraction showed that the crystalline structures of ZnO films grown under different O-2 pressure almost remained unchanged. The underlying mechanism of low-temperature epitaxy of high-quality ZnO films and its applications in electronic and optoelectronic devices are discussed. (C) 2000 Elsevier Science B.V. All rights reserved.

X-Ray Absorption Fine Structure of Zno Thin Film on Si and Sapphire Grown by Mocvd

The Effects of Oxygen Partial Pressure and Substrate Temperature on the Structural and Optical Properties of Zno Films

Effect of Solution Concentrations on Crystal Structure, Surface Topographies and Photoluminescence Properties of ZnO Thin Films

Comparisons of Structural and Optical Properties of ZnO Films Grown on Sapphire and Si(001)

Microstructure, surface morphology and optical properties of Na x Cu y Zn 1− x − y O thin films

Rutherford Backscattering and Optical Studies for Zno Thin Films on Sapphire Substrates Grown by Metalorganic Chemical Vapor Deposition

Structural and Optical Studies of Mg(X)Zn(1-X)Ofilms Grown on Sapphire

Microstructure Study of Zno Thin Films on Si Substrate Grown by Mocvd

Structural and Optical Characterizations of ZnO Films Grown by Reactive Electron Beam Evaporation

Epitaxial Growth Of Zno On Gan/Sapphire Substrate By Radio-Frequency Magnetron Sputtering

In Situ High Temperature X-Ray Diffraction Studies of Zno Thin Film

XAFS Study on ZnO Films Grown by Molecular Beam Epitaxy

Electronic Structure of Nanostructured Zno from X-Ray Absorption and Emission Spectroscopy and the Local Density Approximation

The Study of Composition Non-Uniformity in Ternary Mgxzn1-Xo Thin Films

Structural, Optical and Half-Metallic Properties of Mn and As Co-Implanted ZnO Thin Films

Low-Temperature Epitaxy Of Zno Films On Si(001) And Silica By Reactive E-Beam Evaporation

Temperature Dependence of Surface and Structure Properties of Zncdo Film

Zno Thin Film Grown by Metal-Organic Chemical Vapor Deposition

X-ray Absorption and Emission Spectroscopy of ZnO Nanoparticle and Highly Oriented ZnO Microrod Arrays

Optical Properties and Structural Characteristics of Zno Thin Films Grown on A-Plane Sapphire Substrates by Plasma-Assisted Molecular Beam Epitaxy

X-ray Photoelectron Spectroscopy Study of ZnO Films Grown by Metal-Organic Chemical Vapor Deposition