Noninvasive Conductivity Imaging of 2d Materials and Devices by Microwave Impedance Microscopy

Di Wu,Keji Lai

DOI: https://doi.org/10.1109/mwsym.2016.7540192

2016-01-01

Abstract:Microwave impedance microscopy (MIM) is a novel technique to map out the electrical properties of materials with a mesoscopic (10-100 nm) spatial resolution. The near-field tip-sample interaction enables the conductivity imaging without the need of patterning electrodes, i.e., in a noninvasive manner. This paper demonstrates the application of MIM to visualize the degradation process of black phosphorus, the thermal and laser-assisted oxidation of WSe2 in the ambient condition, and the spatial evolution of channel conductance of a working MoS2 field-effect transistor device. Nanoscale microwave imaging is thus indispensable for the research of various two-dimensional materials.