Comparison of Phase Extraction Algorithms in Testing of Phase Defects with Two-Point Interference

Qi Zi-wen,Liu Bing-guo,Zhang Zhong-hai,Lu Bing-hui,Liu Guo-dong
DOI: https://doi.org/10.3788/co.20160904.0483
2016-01-01
Abstract:Two-point interference is an important method in testing of phase defects in optical elements with large diameter.In order to analyze the effects of errors on phase extraction algorithms in two-point interference system,the system structure and theoretical model are given firstly.Based on it,the Hariharan 5-frame algo-rithm,13-frame algorithm and the advanced iterative algorithm are studied and simulated considering the line-ar phase shift error,nonlinear phase shift error,intensity error and random vibration error.The result shows that the accuracy of 13-frame algorithm is generally higher than that of 5-frame algorithm and the effect of ad-vanced iterative algorithm is better than the other two.When the errors are given according to the analysis,the RMS error of the advanced iterative algorithm is less than those of 5-frame algorithm and 13-frame algorithm, and the PV of advanced iterative algorithm is less than 0.5 nm steadily.This means that the error of advanced iterative algorithm is affected less by errors while vibration plays the major role in the errors discussed.
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