Smoothness Driving Technology of the Spindle of BOE Direct Laser Writing Device

熊木地,谭久彬,邢忠宝
2003-01-01
Abstract:The velocity stability of spindle is a key factor that affects lithography accuracy in binary optic elements (BOE) direct laser writing device.Using mechanic low pass filter(MLPF) and electric low pass filter to eliminate the effect of the axial and radial vibrations of the motor on the system is proposed,which improves the smoothness and stability of transient motion of the spindle system.The frequency difference and phase difference from the phase detector and the speed signal of the spindle are used to optimize the structure of phase-locked speed-regulating system.The neural network is used to improve the nonlinearity of the phase-locked loop,and the fuzzy self-regulating method is employed to adjust the controller parameters.The results show that the axial and radial vibrations of less than 20 nm are obtained by the mechanic and electric low pass filters and the improved phase-locked loop control could greatly increase the speed regulating range of the spindle and make its dynamic characteristics better.
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