Wavelet Transform and Its Application in Extraction of Micro-Resonator Motion Track Features

金翠云,栗大超,靳世久,冯亚林,李一博,郝一龙
DOI: https://doi.org/10.3321/j.issn:1004-924x.2004.03.007
2004-01-01
Optics and Precision Engineering
Abstract:According to the characteristics of micro-resonator motion images, wavelet transform is used to extract the micro-resonator motion track features. Based on the blur image synthetic technique, wavelet transform was applied to enhance and abate noise of blur micro-resonator motion images, while the traditional image processing method is used to extract the motion track features, and finally the natural parameter of micro-resonator was acquired as important reference for MEMS design. In comparison with traditional image processing method, wavelet transform method has better measurement resolution, and its measurement repetition error is 100 nm.
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