Fabrication Process of ZrO2 Film by Electrodeposition

曹建春,郭忠诚,周晓龙,范莹莹,李晓林,张欢
DOI: https://doi.org/10.3969/j.issn.1003-1545.2004.03.007
2004-01-01
Abstract:ZrO_2 film was electrodeposited in Zr(NO_3)_4 solution. The effects of bath composition, pH, current density and plating time on ZrO_2 film were studied. The composition, morphology and thickness of ZrO_2 film were also investigated. Results showed that high quility ZrO_2 film could be obtained from the aqueous solution by addition of proper complex and additives.
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