Low-Temperature, High-Density Plasmas in Long Micro-Tubes

J. Gou,Y. Xian,X. Lu
DOI: https://doi.org/10.1063/1.4949349
IF: 2.2
2016-01-01
Physics of Plasmas
Abstract:A low-temperature He microplasma plume generated in a micro quartz tube with the inner diameter decreasing from 245 μm to 6 μm is reported. The microplasma plume has a length of around 1.5 cm and reaches the position where the tube diameter is 10 μm. Though the inner diameter of the tube is in sub-millimeter, the cross section of the tube is not fully filled with the plasma only until the tube inner diameter is down to 30 μm. The electron density estimated from Hα stark broadening increases as the inner diameter of the tube decreases. The ignition voltage increases from 11 kV to 40 kV as the diameter of the inner quartz tube decreases from 245 μm to 10 μm. Further analysis shows that, in order to ignite a non-equilibrium plasma plume in 1 μm diameter tube, the applied voltage of about 65 kV is needed and the plasma density could be as high as ∼1018 cm−3.
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