THE EFFECT OF Mo-DOPING ON OXYGEN SENSITIVITY OF TiO2-x FILM ELEMENT

ZHENG Liaoying,XU Mingxia,LIU Liyue,XU Tingxian,DONG Xianghong
DOI: https://doi.org/10.3321/j.issn:1005-3093.2000.z1.042
2000-01-01
Abstract:The TiO2 films on A12O3 substrates have been prepared by dip-coating method. The tetrabutyl titanate and absolute ethanol were used as raw material and solvent respectively. Some stabilizing agents were added in the solution to obtain stable sols. The TiO2-x. films were gained by reducing TIO2-x films in H2 atmosphere at 1000 . The Mo-doped TiO2-x. films were made of immersing the TiO2-. films in ammonlum molybdate sol for some hours. The experiment results showed that Mo-doped TiO2-x films had better oxygen sensitivity and reproducibility of oxidizingreducing atmosphere than pure TiO2-. films at 800 , and they had excelfent resistance-temperature stability in N2 atmosphere. The roles of Mo in the film were also investigated by using XPS analysis.
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