A bit reconfigurable attenuator based on MEMS switch and TAN resistor

Xiaotong Liang,Zhuhao Gong,Zewen Liu
DOI: https://doi.org/10.1109/CSTIC.2016.7463910
2016-01-01
Abstract:In this paper, a novel design of a bit reconfigurable attenuator based on MEMS switch and TaN resistor is presented. The overall size of the new design is smaller than that of the traditional RF power attenuator. The proposed attenuator was modeled and simulated using commercial software and fabricated using surface micromachining process. The results of the tests indicate this new MEMS attenuator has very good performance in the application frequency range of DC-20GHz. The pull-down voltage of the switch is only 40 V. In the frequency range of DC to 20 GHz, when the transmission path is turned on, its insertion loss is less than -3.8 dB and the return loss is more than -10.8dB. When the attenuation path is turned on, its measured attenuation is at 11.3±2.1 dB and the return loss is more than -19.8dB@DC-20GHz.
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