Abstract:High-sensitivity flow measurement technology is a prerequisite for precise dynamic control of microfluidics. Despite the advances in structure optimization, a more efficient approach to improve device sensitivity can be realized by leveraging materials with a higher temperature coefficient of resistance (TCR). This work presents the design and simulation of a vanadium dioxide (VO 2 )-based microfluidic thermal flow sensor with record high sensitivity. Owing to the phase change property, VO 2 demonstrates the maximum TCR of -0.703 K -1 and -0.63 K -1 in the major heating and cooling curves, respectively, which is more than two orders of magnitude higher than commonly used thermal-sensitive materials. To fully utilize the high thermal sensitivity of VO 2 , a dual-heater configuration (DHC) with enhanced thermal differential effect is proposed, and its sensing performance is evaluated in the flow range below 10 μL∙min -1 . By individually operating the VO 2 thermal sensors at critical transition temperatures in the major hysteresis loop, the sensitivity can reach as high as 2.79 V/μL∙min -1 , which is about 187.88 times and 277.89 times higher than the VO 2 -based anemometer and the Pt-based DHC sensor, respectively. The research in the present work may enable a breakthrough in the improvement of high-performance microfluidic thermal flow sensors in the ultra-low flow region using non-standard metamaterials.

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