Micromachined gyroscope of electromagnetic levitating rotor and its analysis of levitating force and stability

吴校生,陈文元,张卫平
DOI: https://doi.org/10.3969/j.issn.1000-9787.2003.12.004
2003-01-01
Abstract:The micromachined gyroscope of electromagnetic levitating rotor has the working principle of traditional gyroscope and the characteristic of suitability for batch-produce through the micromachined process, and the micromachined gyroscope with high accuracy is hopeful to be obtained. Based on electromagnetic field (theory,) micromachined gyroscope of electromagnetic levitating rotor can be levitated, rotated and stabilized. (Using) ANSYS5.6, the influence of current amplitude and planar coil width on levitating force is analyzed. The (working) stability of the micromachined gyroscope is analyzed, and that the stability coil makes the micro-gyroscope (work) stably is verified. The numerical calculation provides foundation for optimizing the structure design of the micromachined gyroscope.
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