Characterization for Optical Properties of Photonic Materials and Devices by SNOM

王佳,徐铁军
DOI: https://doi.org/10.3321/j.issn:1002-1582.2002.05.004
2002-01-01
Optical Technique
Abstract:Due to the invention of scanning near-field optical microscopy(SNOM),resolution at 50-100nm level using visible or near infrared light is now practical. The SNOM technique as well as its application to the characterization of photonic materials and devices are reviewed. Several examples such as semiconductors, waveguide device and photonic crystal are discussed. Detection of nanometer location of optical field and evanescent field can show many results which can not be found in far field, provides an effective technique for characterization of photoelectrical materials in nanometer scale.
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