Abstract:This paper discusses the pulse signal of a highly sensitive lateral deformable optical microelectromechanical systems (MEMS) displacement sensor based on Wood's anomalies and its corresponding tolerance. The optical reflection amplitude of the device changes with the displacement of the nanostructured grating elements. Unexpectedly, the device's original sinusoidal signal develops into a new signal form (i.e., a pulse signal), when the air gap between the two layers of gratings decreases. Since the slope of the pulse signal, namely 2.5%/nm (i.e., 0.65 dB/nm), is eight times higher than that of the original signal form, namely 0.3%/ nm (i.e., 0.03 dB/nm), the sensitivity of the structure improves by eight times. However, this device is very sensitive to parameters such as its wavelength, period, duty ratio, and air gap. In this paper we used rigorous coupled wavelength analysis (RCWA) to analyze and optimize the respective influence of each parameter on the device's performance. We have introduced two methods to search for the optimal setting and have demonstrated the optimal settings of different incident lights. The simulation results indicate that it is close to 85% possible to achieve an actual device with the highest slope superior to 0.5%/nm and it is 64% possible that the highest slope of an actual device falls in the interval ranging from 1.0%/nm to 2.0%/nm. All the simulated data helped us better understand the tolerance of the pulse signal and guide us toward the development of an actual device. (C) 2015 Optical Society of America

Research on High Sensitivity Displacement Sensor Based on Planar Ring Micro-cavity Structure

A High-Resolution Displacement Sensor Based on a Grating Interferometer with the Phase Modulation Technique

Integrated High Sensitivity Displacement Sensor Based on Micro Ring Resonator

Subnanometer Resolution Displacement Sensor Based on a Grating Interferometric Cavity with Intensity Compensation and Phase Modulation

Nanometer-scale Displacement Sensor Based on Phase-Sensitive Diffraction Grating.

Highly Sensitive Lateral Deformable Optical MEMS Displacement Sensor: Anomalous Diffraction Studied by Rigorous Coupled-Wave Analysis.

High-precision micro-displacement sensor based on tunnel magneto-resistance effect

Highly Sensitive Displacement Sensor Based on Composite Interference Established Within a Balloon-Shaped Bent Multimode Fiber Structure.

Micro Sensors Based on Planar Microtoroid Cavities

Micro displacement sensor based on line-defect resonant cavity in photonic crystal.

Micro-Displacement Sensor with Large Dynamic Range Based on Photonic Crystal Co-Directional Coupler

Design of Double-Layer Electrically Extremely Small-Size Displacement Sensor

Design and Modeling of a Novel Micro-Displacement Sensor Based Optical Frequency Comb

Experimental Investigation of Waveguide Sensor Based on Cascaded-Microring Resonators with Vernier Effect

High-sensitivity Optical Sensors Based on Cascaded Reflective MZIs and Microring Resonators

Numerical analysis of effective refractive index ultrasonic sensor based on Cantilever arm structure slot-based dual-micro-ring resonator

An ultracompact high-resolution displacement sensor based on self-interference effect of single optical nanograting

A Displacement Sensor Combining Cavity Tuning of A Laser with A Piezoelectric Transducer'S Subdivision Technique for A Bidirectional Sampling on the Rising and Falling Flanks

High-sensitivity silicon photonic biosensors based on cascaded resonators

Design and Numerical Simulation of Displacement Sensor Based on Helix Antenna

Research on Temperature-Insensitive Micro-Displacement Sensor Cascaded With Spherical Structure