Application of PLC in ECR plasma facility

吕鑫,程健,彭辉俊
DOI: https://doi.org/10.3969/j.issn.1002-0322.2004.05.007
IF: 4
2004-01-01
Vacuum
Abstract:Introduces the characteristics of ECR plasma facility and puts forward the way how to control the facility with PLC. The hardware of the facility is composed of a touch panel or supervisor PC, PLC and signal modulation circuit, with its softwares incluling touch panel and PLC running programs we developed further. The facility can work wholly manually, only by touch panel in manual mode or full automatic mode to measure the plasma parameters, such as electronic temperature, ion density and space potential.
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