Computer simulation of microsensors and microactuators

Xiao-wei LIU,Wei WANG,Xi-lian WANG,Yu-qiang LIU,Zhen-mao LIU
DOI: https://doi.org/10.3969/j.issn.1000-9787.2000.03.006
2000-01-01
Abstract:: The application of computer simulation for microsensor and microactuator design is presented. The designs of polysilicon pressure sensors and micropump membranes were optimized by computer simulation and ana- lysis. It is shown that computer simulation is the effective tool of microsensor and microactuator designs.
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