Control System of Intelligent Polishing Machine at Nanometer Level

赵文宏,袁巨龙,吕冰海,常敏,邢彤,赵萍
DOI: https://doi.org/10.3969/j.issn.1005-2402.2003.08.007
2003-01-01
Abstract:In this paper, the intelligent control system of the intelligent polishing machine at nanometer level is introduced, its realization method is studied, its structure is analyzed as well as the solution based on the expert control system is proposed and established. The polishing machine is intelligently controlled by using Windows CE software platform, graphic interface function indicator, just in time operating system of high reliability, RISC inserted processor of super digital analog hybrid, high accuracy grating sensor, stepless speed regulation as well as brushless DC motor driver technology.
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