Abstract:Periodic nanostructures have been widely used in many fields, such as optics, biomedical, and superhydrophobic surface, which has drawn increasing attention in the last few years. It is still challenging how to fabricate a large-scale periodic nanostructure with high efficiency and good consistency. In this study, a multi-tip diamond tool is utilized to machine large-scale ripple structures based on a homemade four-axis micro-machine tool. A theoretical model based on orthogonal cutting is established to investigate the relationship between the cutting force and the machined depth. The theoretical normal values calculated using this established model agree well with the experimental results. Moreover, the subsurface characterizations of the machined multi-grooves with depths of 220 nm and 1030 nm are investigated by TEM. The TEM results reveal that geometrically necessary boundaries (GNBs), subgrains, dislocations, and stacking faults are induced in the cutting process for the multi-grooves with a depth of 220 nm owing to the accumulation of strain. For the multi-grooves with a depth of 1030 nm, the sample materials undergo a more severe shear and high defect concentration, which could cause the slip band, nanocrystallites, and amorphous structures. Large-scale ripple structures with the ranges of 200 μm × 500 μm and 450 μm × 500 μm, respectively, are machined by scratching 40 times with a feed of 5 μm and 30 times with a feed of 15 μm. Our findings are significant for machining a high-quality periodic nanostructure with high efficiency and good consistency that can be used in the optical field.

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