Improved Ph Sensing Performance with Microarray ISFETs under Pulse AC Bias

Ning Luo,Di Su,Honglei Wang,Yuchen Liang,Fulin Peng,Haibo Yu,Tao Zhang,Jun Tao,Dian Zhou,Xuan Zeng,Walter Hu
DOI: https://doi.org/10.1109/nano.2018.8626284
2018-01-01
Abstract:__ Biochips of 256 micro-ISFETs were made with 0.18 um CMOS processes towards pH based DNA sequencing. We implemented a pulse voltage biasing method to improve pH sensing performance. Compared to pulse DC biasing, pulse AC can achieve much better stability and higher sensitivity.
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