The Research on Integrated Cellular Chip Based on Multifunction Cell-based Biosensor

肖丽丹,余辉,胡朝颖,蔡华,刘清君,王平
DOI: https://doi.org/10.3969/j.issn.0258-8021.2010.03.018
2010-01-01
Abstract:In order to monitor the process of cellular metabolism and electrophysiology,we developed a novel biochip,on which interdigited electrodes(IDE),microelectrode arrays(MEA) and light-addressable potentiometric sensor(LAPS) were integrated.It can be used in real time detection of cell-electrode impedance,extracellular field potential and cellular ionic metabolism.In the design,the three parts of functions were integrated in a multi-channel way.The size of electrodes,inter-electrode distance and surface properties of electrodes were optimized to reduce the electric disturbance between electrodes and in the mean time to improve performance.In the fabrication,the SiO2 layer was used as the insulation layer of MEA and IDE as well as the protective layer of LAPS,by which three types of sensors were integrated onto a single silicon wafer compatibly.The testing result showed that this integrated cellular chip could provide more than a single parameter with similar performance of separately fabricated chips.Above all,it would be a potential platform to study the electrophysiology and metabolism of cells,and further the pharmacological assays and bionic research.
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