Abstract:Silicon nanowire field-effect transistor (SiNW-FET) sensors possess the ability of rapid response, real-time, and label-free detection with high sensitivity and selectivity in the analysis of charged molecules. Their nano-scale size makes them well suited for ultralow detection of charged molecules, but also brings the uniformity fabrication challenging, thus limiting their large-scale application. By a horizontal control approach, highly controllable silicon nanowires arrays at the top of the silicon-on-insulator (SOI) wafer (T-SiNW) were developed in our previous work. To further improve the device uniformity, here a novel SiNW fabricated approach was carefully designed by the combination of horizontal and vertical control. The new silicon nanowires appeared at the bottom of the top silicon layer (B-SiNW). The B-SiNW has a relatively low requirement on the fabrication process and better device uniformity compared to T-SiNW. These improvements resulted in the B-SiNW device with a lower current fluctuation (4.1 nA with 5.1% variations) in the flowing liquid, compared to the T-SiNW device (4.4 nA with 11% variations). Further, in quantitative detection of 40 ng/mL MMP-9, the B-SiNW sensors provided larger signals and lower fluctuation (normalized average response value: 0.57 with 4.2% variations), compared to the T-SiNW sensors (0.41 with 12.1% variations), thus indicating a more accurate bio-analysis application of the B-SiNW sensor. This work advances the nanowire sensor technology a step closer toward large-scale application to create stable sensing platforms in disease diagnosis and monitoring.

Simulation of Si nanowire biosensor: Effects of surface and biasing on sensitivity and linearity

Effects of Charge Screening and Surface Properties on Signal Transduction in Field Effect Nanowire Biosensors

The Role of Surface Charge and Binding Properties in Silicon-Based Field Effect Nanowire Biosensors

Performance Analysis of Si Nanowire Biosensor by Numerical Modeling for Charge Sensing

Investigation of Silicon Nanowire Biosensors Using the 2D Drift-diffusion Model

Overcoming the screening-induced performance limits of nanowire biosensors: A simulation study on the effect of electro-diffusion flow

Numerical Study of Single Molecular Charge Sensing by FET-Integrated Nanopore Biosensor

Modeling and Simulation of Orientation-Dependent Fluctuations in Nanowire Field-Effect Biosensors Using the Stochastic Linearized Poisson-Boltzmann Equation

Calculation of Fluctuations in Boundary Layers of Nanowire Field-Effect Biosensors

Doping fluctuation induced performance variation in SiNW biosensors

A Theoretical and Simulation Analysis of the Sensitivity of SiNWs-FET Sensors

The possibility of ultrasensitive detection of biomolecules using silicon nanowire biosensor with structural optimization

Application of Silicon Nanowire Field Effect Transistor (SiNW-FET) Biosensor with High Sensitivity

A Calibration Strategy for Silicon Nanowire Field-Effect Transistor Biosensors and Its Application in Ultra-Sensitive, Label-Free Biosensing

Analytical Modeling of Silicon Nanowire Dielectric Modulated Reconfigurable FET Biosensor

Highly sensitive pH sensors based on double-gate silicon nanowire field-effect transistors with dual-mode amplification

A controllable fabrication improved silicon nanowire array sensor on (111) SOI for accurate bio-analysis application

Ph Response of Silicon Nanowire Sensors: Impact of Nanowire Width and Gate Oxide

Nanowire biosensors for label-free, real-time, ultrasensitive protein detection.

A 3-D-silicon Nanowire FET Biosensor Based on a Novel Hybrid Process

Subthreshold Regime Has the Optimal Sensitivity for Nanowire Fet Biosensors