Abstract:Pulsed DC magnetron sputtering was used to deposit indium‑tin-oxide (ITO) thin films on glass substrates for application in photovoltaic devices as the final window layer. The evolution of crystal phase, morphology, resistivity and transmittance of the ITO films under different thermal annealing procedure (in-situ annealing versus post-annealing) at relatively low temperatures (up to 300°C) were studied. Fully crystalline ITO films with low sheet resistance of 24Ω/□ and high average transmittance (exclude glass substrate) of 90.10% with a Haacke's figure of merit 1.47×10−2Ω−1 were obtained by in-situ annealing at 200°C. In comparison, the minimum temperature observed to fully crystalize the ITO thin films with competitive crystallinity, electrical and optical properties by post-annealing was 250°C. The corresponding post-annealed 300nm thick films showed sheet resistance of 49Ω/□ and average transmittance (exclude glass substrate) as high as 91.93% with a Haacke's figure of merit 0.882×10−2Ω−1. The surface morphology of the as-deposited ITO films remained homogeneous after post-annealing whereas large particles (up to 100nm) were observed on the surface of the films deposited by in-situ annealing. The results indicated that different thermal treatment procedures at lower temperatures produce significant effect on the electrical, optical and other physical properties of the ITO thin films which are critical for the window layer in photovoltaics.

Impact of In Situ Annealing Time on CdTe Polycrystalline Film and Device Performance

Influence of Growth and Annealing of Polycrystalline CdTe Films on Interfacial Properties of CdS/CdTe

Annealing Effects on the Solution Processed CdTe Nanocrystals Solar Cells

CHARACTERIZATION AND ANNEALING OF CdTe THIN FILM PREPARED BY VAPOR TRANSPORT DEPOSITION

Spectral Analysis of the Effect of Annealing on CdTe Polycrystalline Film

CdS annealing treatments in various atmospheres and effects on performances of CdTe/CdS solar cells

High-efficiency CdTe-based Thin-Film Solar Cells with Unltrathin CdS:O Window Layer and Processes with Post Annealing

Effects of Cdcl2 Annealing Temperatures on the Properties of Pulsed Laser Deposited Cds Thin Films and Cds/Cdte Solar Cells

Effect of Different Thermo-Treatment at Relatively Low Temperatures on the Properties of Indium‑tin-Oxide Thin Films

Post-thermal Annealing for Enhancing Photovoltaic Performance of CdS/CdSe Quantum Dot Co-Sensitized TiO 2 Electrodes

Properties of sputtered CdS and CdTe films and performance of CdTe solar cells as a function of annealing temperature

The effect of large scale CdTe polycrystalline film of annealing

Effects of Different Cdcl2 Annealing Methods on the Performance of Cds/Cdte Polycrystalline Thin Film Solar Cells

Effect of CdCl_2 annealing treatment on interdiffusion and reaction at the CdS/CdTe interface

Effect of the hydrogen annealing on the properties of Mo/CuIn1-xGaxSe2/CdS solar cells junction

Effect of Annealing on the Properties of Antimony Telluride Thin Films and Their Applications in Cdte Solar Cells

Spectral Analysis of Effects of Annealing on the Characteristics of Intrinsic Sno2 Polycrystalline Thin Films

Influence of annealing on the properties of CdS polycrystalline thin films deposited by close-spaced sublimation

Annealing Effect on Photovoltaic Performance of Hybrid P3ht/In-Situ Grown Cds Nanocrystal Solar Cells

Effects of Annealing in Te2 Atmosphere on Photoelectric Properties and Carrier Transport Properties of CdZnTe Films

Influence of annealing on the surface structure evolution of intrinsic p-type HgCdTe films.