Highly conductive two-dimensional electron gas at the interface of Al 2 O 3 /SrTiO 3

Zhaoting Zhang,Hong Yan,Shuanhu Wang,Min Wang,Lixia Ren,Changle Chen,Kexin Jin
DOI: https://doi.org/10.1007/s10853-018-3167-6
IF: 4.5
2018-01-01
Journal of Materials Science
Abstract:We create a two-dimensional electron gas at the Al 2 O 3 /SrTiO 3 /LaAlO 3 heterostructures using pulsed laser deposition, which exhibits a decreasing sheet resistance with increasing growth temperatures of Al 2 O 3 films. Structural characterizations of films are confirmed by cross-sectional transmission electron microscopy. Compared with these heterostructures with Al 2 O 3 films deposited on pristine SrTiO 3 and TiO 2 -terminated SrTiO 3 substrates, the Al 2 O 3 /SrTiO 3 /LaAlO 3 heterostructures are more conductive. X-ray photoelectron spectroscopy indicates the formation of oxygen vacancies at the SrTiO 3 side of the interface, which results from the redox reactions by reducing SrTiO 3 films. Furthermore, the existence of oxygen vacancies on the SrTiO 3 side is verified by a blue-light emission.
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