Abstract:Nanocrystalline carbon films containing preferentially oriented graphene-based nanocrystals within an amorphous carbon matrix have attracted significant theoretical and experimental interest due to their favorable chemical and physical properties. At present, there are intense efforts to study the grain size and growth orientation of the graphene-based nanocrystals to achieve a controllable growth of nanocrystalline carbon films. However, despite the frequent use of plasma-assisted deposition techniques, the atomistic-scale mechanisms, including the effects of plasma density and energy on the nucleation process and growth orientation of the graphene-based nanocrystals, as well as associated dynamic processes involved in deposition processes, have not yet been thoroughly studied. In this paper, the plasma-assisted growth of nanocrystalline carbon thin films with preferentially oriented nanocrystals was systematically studied by hybrid molecular dynamics-Monte Carlo simulations using a recently developed force field, the charge-implicit ReaxFF. By combining the experimental data with the atomistic simulations, we reveal that plasma ion bombardments, in suitable ranges of energies and densities, allow the highest nucleation density in the nanocrystalline carbon films. Theoretically optimum windows of the plasma energy and density are first presented in the form of crystallization phase diagrams. Furthermore, to investigate the relationship between the growth orientation and the plasma ion energy, simulations of graphene irradiated with Ar ions from different incident angles were also performed. On the basis of the mechanism of "survival of the fittest", we proposed using the critical energy of generating the Stone-Thrower-Wales defects to design the growth orientation of graphite-like nanocrystals by controlling the plasma ion energy.

Confirming the Key Role of Ar+ Ion Bombardment in the Growth Feature of Nanostructured Carbon Materials by PECVD.

Characterization of Plasma-Enhanced Chemical Vapor Deposition Carbon Nanotubes by Auger Electron Spectroscopy

Preferential Growth of Carbon Nanotubes/Nanofibers Using Lithographically Patterned Catalysts

Syntheses of carbon nanomaterials by radio frequency plasma enhanced chemical vapor deposition

Enhancement of the properties of pulsed laser-deposited carbon nitride by the synchronisation of laser and N2 gas jet pulses

Effect of Ion Bombardment on the Synthesis of Vertically Aligned Single-Walled Carbon Nanotubes by Plasma-Enhanced Chemical Vapor Deposition

Uniform Patterned Growth of Carbon Nanotubes Without Surface Carbon

Growth of Aligned Multiwall Carbon Nanotubes and the Effect of Adsorbates on the Field Emission Properties

Flipping growth orientation of nanographitic structures by plasma enhanced chemical vapor deposition

Study of Multi-Walled Carbon Nanotube Structures Fabricated by PMMA Suspended Dispersion

Preparation of carbon nanotubes and nano-particles by microwave plasma-enhanced chemical vapor deposition

Effect of catalyst film thickness on the structures of vertically-oriented few-layer graphene grown by PECVD

Effect of Carbon Deposits on the Reactor Wall During the Growth of Multi-Walled Carbon Nanotube Arrays

Directed Growth of Graphene Nanomesh in Purified Argon Via Chemical Vapor Deposition.

Controlling the Nucleation and Growth Orientation of Nanocrystalline Carbon Films during Plasma-Assisted Deposition: A Reactive Molecular Dynamics/Monte Carlo Study

The nucleation and growth of graphene under a controlled atmosphere during radio frequency-plasma-enhanced chemical vapor deposition

Effects of gas pressure and plasma power on the growth of carbon nanostructures

Gas-induced formation of Cu nanoparticle as catalyst for high-purity straight and helical carbon nanofibers.

Investigation on the Formation Mechanism of Double-Layer Vertically Aligned Carbon Nanotube Arrays via Single-Step Chemical Vapour Deposition

Influence of plasma condition on carbon nanotube growth by rf-PECVD

Carbon fiber-promoted activation of catalyst for efficient growth of single-walled carbon nanotubes