Significantly Enhanced Mechanical Properties in AlN Helix.

Xinghong Zhang,Chaoliang Zhao,Tai Yao,Shanbao Zhou,Jiecai Han,Jiajie Li,Tangling Gao,Xianjie Wang,Kun Zheng,Bo Song
DOI: https://doi.org/10.1088/1361-6528/aa73e7
IF: 3.5
2017-01-01
Nanotechnology
Abstract:To safely and reliably use aluminum nitride (AlN) helices in the fabrication of novel micro/nanodevices, it is very important to know their mechanical properties. Herein, we investigate the mechanical properties of individual AlN helices using an in situ tensile-bending test. Tensile tests reveal that an AlN helix has an average epsilon of similar to 4.7 +/- 0.8% elastic deformation before a typical brittle fracture occurs. The bending test shows a two-step mechanical feature-linear-elastic followed by an elastic-plastic process-with an average epsilon(bent) of similar to 54.5 +/- 0.6%. Our results provide direct cognition about the mechanical properties of AlN helices and their benefit to the design of AlN-based flexible micro/nanodevices.
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