Abstract:In the past 10 years, adaptive wavefront interferometry (AWI) has been employed for measuring freeform surface profiles. However, existing AWI techniques relying on stepwise and model-free stochastic optimizations have resulted in inefficient tests. To address these issues, deterministic adaptive wavefront interferometry (DAWI) is firstly introduced in this paper based on backpropagation (BP), which employs a loss function to simultaneously reconstruct and sparsify initial incomplete interferometric fringes until they are nulled. Each iteration of BP requires two phase shifts. Through simulations, we have verified that freeform wavefront error with a peak-to-valley (PV) of up to 168 λ can be fully compensated in tens of iterations using a 1024 × 1024 pixel area of a liquid-crystal spatial light modulator. In experiments, we accomplished a null test of a freeform surface with 80% missing interference fringes in 39 iterations, resulting in a surface profile error PV of 66.22 λ and measurement error better than λ/4. The DAWI has at least 20 times fewer iterations in fringe reconstruction than the 3-step AWI methods, and nearly an order of magnitude fewer iterations in the whole process, paving the way for significantly enhanced efficiency, generality and precision in freeform surface adaptive interferometry.

Pure adaptive interferometer for free form surfaces metrology.

Optical Free Form Surface Metrology In Adaptive Polarized Interferometry

Misalignment Correction for Free-Form Surface in Non-Null Interferometric Testing

Research on Two Optical Methods for Aspheric Measurement

Adaptive Optics Based Non-Null Interferometry for Optical Free Form Surfaces Test

Aspheric and Free-Form Surfaces Test with Non-Null Sub-Aperture Stitching

Research Advances in Adaptive Interferometry for Optical Freeform Surfaces

Model-Based Phase-Shifting Interferometer

Near Common-Path Optical Fiber Interferometer for Potentially Fast On-Line Microscale-Nanoscale Surface Measurement

Model-based adaptive non-null interferometry for freeform surface metrology

Adaptive null interferometric test using spatial light modulator for free-form surfaces.

Freeform Metrology Based on Phase Retrieval and Computer-Generated Hologram

Adaptive Interferometric Null Testing for Unknown Freeform Optics Metrology.

Freeform Surface Measurement with Non-Null Interferometry

Freeform Surface Interferometry with an Adaptive Ring-Cavity Compensator

Adaptive Wavefront Interferometry for Unknown Free-Form Surfaces

Measurement of Freeform Optical Surfaces: Trade‐Off Between Accuracy and Dynamic Range

Measurement of Freeform Optical Surfaces: Trade-Off between Accuracy and Dynamic Range

Flexible interferometric null testing for concave free-form surfaces using a hybrid refractive and diffractive variable null.

Interferometric Measurement of Freeform Surfaces Using Irregular Subaperture Stitching

Fast, Intelligent and High-Precision Adaptive Null Interferometry for Optical Freeform Surfaces by Backpropagation.