Confocal Total Reflection X-ray Fluorescence Technology Based on an Elliptical Monocapillary and a Parallel Polycapillary X-ray Optics

Yu Zhu,Yabing Wang,Tianxi Sun,Xuepeng Sun,Xiaoyun Zhang,Zhiguo Liu,Yufei Li,Fengshou Zhang
DOI: https://doi.org/10.1016/j.apradiso.2018.04.004
IF: 1.787
2018-01-01
Applied Radiation and Isotopes
Abstract:A total reflection X-ray fluorescence (TXRF) spectrometer based on an elliptical monocapillary X-ray lens (MXRL) and a parallel polycapillary X-ray lens (PPXRL) was designed. This TXRF instrument has micro focal spot, low divergence and high intensity of incident X-ray beam. The diameter of the focal spot of MXRL was 16.5 µm, and the divergence of the incident X-ray beam was 3.4 mrad. We applied this TXRF instrument to the micro analysis of a single-layer film containing Ni deposited on a Si substrate by metal vapor vacuum arc ion source.
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